高精度合成式波前编码器件检测方法研究

发布时间：2018-05-19 22:28

本文选题：合成式波前编码器件(合成式相位板) + 光学设计　；参考：《苏州大学》2016年硕士论文

【摘要】：合成式波前编码器件(或合成式相位板)是一种非旋转对称式非球面,它是由三次相位面面形和凸双曲面面形相叠加而成,具有相位编码功能和光学聚焦功能。由于该器件各个方向的光焦度均不同,可以很好的校正传统成像系统的某些缺陷,这一显著的优势已逐渐引起人们的关注,并应用在某些光学系统的仿真模拟中。由于合成式波前编码器件面形的独特性,它的应用一直受到光学加工和检测技术的限制。虽然目前光学加工和检测技术迅速发展,但是合成式波前编码器件的加工和检测手段仍不成熟,无法满足实际应用的需求,所以寻求一种对其可以进行高精度检测的方法显得尤为重要。本文针对合成式波前编码器件面形的特殊性,提出利用干涉测量技术同时借助于衍射补偿器——计算全息图(CGH),来实现对合成式波前编码器件的高精度检测。本文主要的研究内容如下:1、通过对合成式波前编码器件的面形进行分析,总结了几种检测此面形的检测方案,对各检测方案的测试原理及测试性能进行了分析对比,最终确定采用CGH非接触式干涉测量法,该检测方法具有对器件无损伤、测量精度高、易装调等优势,具有较强的工程实用性。2、对计算全息法检测合成式波前编码器件的总体设计思路进行了分析,然后在此基础上进行了系统优化,对系统中的各个光学元件的性能及参数进行了确定,并利用误差理论对其测试性能及参数进行了评估。3、阐述了根据CGH相位方程进行刻蚀条纹位置搜索从而得到CGH加工数据的方法,根据被测器件及测试光路的波前特性,综合考虑装调工艺,完成了计算全息图样板的设计,并进行了加工制作。4、搭建了实验平台,利用制作的CGH样板和Zygo干涉仪对合成式波前编码器件进行检测实验,然后运用误差理论对各个方面引入的实验误差进行详细的分析。最后利用计算全息图给出了波前编码成像系统的成像效果测试系统设计。
[Abstract]:The synthetic wavefront encoder (or composite phase plate) is a kind of non-rotating symmetric aspheric surface which is composed of cubic phase surface and convex hyperboloid which has the function of phase coding and optical focusing. Due to the different optical focus in different directions, this device can correct some defects of traditional imaging system well. This remarkable advantage has gradually attracted people's attention, and has been used in the simulation of some optical systems. Due to the unique surface shape of synthetic wavefront encoder, its application is always limited by optical processing and detection technology. Despite the rapid development of optical processing and detection technology, the fabrication and detection of synthetic wave-front coding devices are still immature and unable to meet the needs of practical applications. Therefore, it is very important to find a method to detect it with high accuracy. In view of the particularity of the surface shape of synthetic wavefront encoder, this paper presents a method of high precision detection of synthetic wave-front encoder by means of interferometry technique and the aid of diffraction compensator, CGH _ (n), in order to realize the high precision detection of synthetic wave-front encoder. The main contents of this paper are as follows: 1. By analyzing the surface shape of synthetic wavefront coding device, several detection schemes are summarized, and the testing principle and performance of each detection scheme are analyzed and compared. Finally, the CGH non-contact interferometric method is adopted. The method has the advantages of no damage to the device, high measuring precision and easy to be adjusted, etc. It has strong engineering practicability. 2. This paper analyzes the overall design idea of detecting synthetic wavefront coding device by CGH, and then optimizes the system based on it. The properties and parameters of each optical element in the system are determined. The testing performance and parameters are evaluated by using error theory. The method of etching stripe position search based on CGH phase equation to obtain CGH machining data is described. According to the wavefront characteristics of the device under test and the light path tested, Considering the assembly and adjustment technology, the design of the CGH template is completed, and the processing. 4. The experimental platform is set up. The synthetic wavefront encoder is tested by the CGH template and Zygo interferometer. Then the error theory is used to analyze the experimental error in detail. Finally, the design of the imaging effect test system of the wavefront coding imaging system is given by using the computer generated hologram (CGH).
【学位授予单位】：苏州大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TH74

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