基于谐振模式的三维纳米测头触发方法研究

发布时间：2018-06-02 05:10

本文选题：三维谐振触发方法 + 三维纳米谐振触发测头　；参考：《合肥工业大学》2015年博士论文

【摘要】：纳米测量技术是纳米科学技术的基础学科之一,超精加工和超微加工进入纳米技术的新时代,MEMS、超精密光学器件等的特征尺寸微型化,对这些微纳米结构的真三维测量要求达到纳米、亚纳米量级,测量力达到微牛甚至纳牛量级。目前在数百微米至数毫米尺度间的真三维测量取得了一定进展,但还没有成熟的技术。而纳米触发定位是实现纳米测量的关键,三维纳米触发定位技术作为微纳米三维技术的核心,是实现微器件等真三维纳米测量的基础,也是目前国内外微纳米三坐标测量机(Coordinate Measuring Machine, CMM)研究中的难点之一。针对微纳米CMM的研究需求和技术瓶颈,本文在对国内外微纳米CMM研究现状和进展分析总结的基础上,提出三维纳米维谐振触发方法,基于该方法研制了三维纳米谐振触发测头及三维纳米谐振触发测量与定位系统,可实现对微内孔试样的高分辨力三维触发测量。完成的主要研究工作和成果总结如下：1)三维纳米谐振触发测头触发方法及工作机理研究。基于界面力学理论分析了三维谐振触发测头的动态接触机理,分别构建了X(Y)、Z向测球-试样表面纳米接触相互作用的力学模型,根据建立的力学模型运动方程分析了范德华力、毛细力等介观尺度界面作用力及合力对测头运动的影响并进行数学仿真。2)三维纳米谐振触发测头构建。基于光纤拉锥技术和田口法二级烧制制备光纤微球,得到二维直径小于80gm,二维圆度小于0.70μm,二维偏心距小于0.65gm、真球度约为0.50μm的一体式光纤微探球。分别以石英音叉、PVDF、双端音叉作为微力传感器,与一体式光纤微探球相结合,利用其谐振参数(谐振振幅、谐振频率/谐振相位)对微力的高敏感性构建了三维谐振触发测头。该种三维谐振触发测头的显著特点是其在Z向工作于轻敲模式,而在X、Y向工作于摩擦模式。分别对石英音叉、PVDF系统噪声水平、灵敏度、触发分辨力、重复性等特性测试分析,得到两系统在X、Y、Z三个方向的触发分辨力均达到亚纳米量级、单向重复性误差均在十纳米量级,其中石英音叉系统的各向测量力均在十至百微牛量级,而PVDF系统的各向测量力达到亚微牛量级。3)三维纳米谐振触发测量与定位系统研制。分别将基于石英音叉、PVDF的三维谐振触发测头与三维纳米定位台、反馈控制模块、信号处理电路结合,构成三维谐振触发测量与定位系统。针对石英音叉三维触发测量与定位系统设计了整体机械结构、基于锁相环路(PLL)的相位反馈控制电路,编写了基于VC++的控制及测试程序。4)三维纳米谐振触发测量与定位系统特性测试。通过对石英音叉系统圆周接近曲线等特性测试,得到系统的各向分辨力均在纳米／亚纳米量级、单向重复性误差、单点触发重复性误差均在十纳米量级。设计了测头测球等效直径的标定方案,并编写了基于VC++的定向标定程序。通过对标准量块组研合成的标准内尺寸进行0。、45。、90。、135。、180。、225。、270。、315。八个方向上的定向标定测试,对微内孔试样测量结果进行修正补偿。最终利用石英音叉系统实现了对微内孔试样的三维触发测量。
[Abstract]:Nano measurement technology is one of the basic disciplines of nano science and technology. Ultra precision processing and ultramicro processing have entered the new era of nanotechnology. The characteristic dimensions of MEMS and ultra precision optical devices are miniaturized. The real three dimensional measurement of these micro nanostructures is required to reach nanometer, subnanometer scale, and the measurement force reaches the size of cattle and even Nanniu. The real three-dimensional measurement between hundreds of microns to several millimeter scale has made some progress, but there is no mature technology. The key to nanometer measurement is nano triggered location. The 3D nano trigger positioning technology is the core of the micro and nano 3D technology. It is the basis of realizing the true three Vinami measurement of microdevices and so on. It is also the domestic and foreign micro nano. One of the difficulties in the Coordinate Measuring Machine (CMM) Machine (CMM) research is one of the difficulties. In view of the research requirements and technical bottlenecks of the micro nano CMM, this paper, based on the analysis and summary of the research status and progress of the micro nano CMM at home and abroad, presents a three-dimensional nano dimension resonance trigger method. Based on this method, the three-dimension nano resonance trigger is developed. The measuring and positioning system of measuring head and three dimensional nanoscale resonance can be used to measure the high resolution three-dimensional trigger of the micro inner hole. The main research work and achievements are summarized as follows: 1) the study of the trigger method and the working mechanism of the three dimensional nano resonant trigger probe. Contact mechanism, the mechanical model of X (Y), Z to the surface of the test ball and the surface of the sample surface is constructed. According to the equation of motion of the mechanical model, the interaction force of Fan Dehua force, the capillary force and the influence of the resultant force on the head motion are analyzed and the numerical simulation of the three dimensional nano resonant trigger head is constructed. Fiber taper technology and Taguchi method are used to prepare optical fiber microspheres by two stages. The two dimensional optical fiber microspheres with a two-dimensional diameter of less than 80gm, a two-dimensional roundness less than 0.70 mu, a two-dimensional eccentricity less than 0.65gm and a true sphericity of about 0.50 m are obtained. The microsphere is used as a micro force sensor with quartz forks, PVDF and double ends, respectively. The resonance parameters (resonance amplitude, resonant frequency / resonant phase) have built a three-dimensional resonance trigger probe for the Gao Min sensibility of micro force. The remarkable characteristic of the three dimensional resonance trigger probe is that it works in the tapping mode at Z, while in the X, Y direction working in the friction mode. The noise level, sensitivity, trigger resolution, and weight of the quartz tuning fork, the PVDF system, the trigger resolution, and the weight. The test and analysis of the properties of the complex properties show that the trigger resolution of the two systems in the three directions of X, Y and Z all reach the order of subnanometer, and the unidirectional repeatability error is at the order of ten nanometers, of which the isotropic force of the quartz tuning fork system is from ten to a hundred micro cattle, and the isotropic force of the PVDF system reaches the sub micron.3). The three dimensional resonance trigger measurement and positioning system based on quartz tuning fork, three dimensional resonance trigger probe of PVDF and three dimensional nanoscale positioning table, feedback control module and signal processing circuit are combined respectively. The overall mechanical structure is designed for the three dimensional trigger measurement and positioning system of quartz tuning fork, and the phase locked loop is based on the phase locked loop. (PLL) the phase feedback control circuit, and write the control and test program based on VC++,.4) the characteristic test of the three-dimension nanometer resonance trigger measurement and positioning system. By testing the circle approach curve of the quartz tuning fork system, the system's anisotropy is obtained in the nanometer / subnanometer scale, the one-way repetition error, the single point trigger repetition The error of the error is at the magnitude of ten nanometers. The calibration scheme of the equivalent diameter of the probe ball is designed, and a directional calibration program based on VC++ is written. The calibration test of the measurement results of the micro inner hole sample is corrected by the calibration test of the standard internal size of the standard gauge block group 0., 45., 90., 135., 180., 225., 270. and 315.. Finally, the three-dimensional trigger measurement of micro hole specimen is realized by using quartz tuning fork system.
【学位授予单位】：合肥工业大学
【学位级别】：博士
【学位授予年份】：2015
【分类号】：TH70

【相似文献】