温度及摩擦对光栅刻划机定位精影响的研究

发布时间：2018-06-19 06:53

  本文选题：衍射光栅 + 光栅刻划机　； 参考：《合肥工业大学》2015年硕士论文

【摘要】：衍射光栅作为光谱仪器中的核心器件,在各领域中有着越来越广泛的应用。机械刻划是衍射光栅制造的重要方式,主要依靠光栅刻划机完成。作为机械领域中最精密的仪器之一,光栅刻划机不仅结构复杂,而且影响其精度的因素很多。光栅刻划机的定位精度是影响光栅性能的重要因素,论文重点研究了环境温度和摩擦对光栅刻划机定位精度的影响,具体完成工作内容如下： (1)为了研究环境温度变化对定位精度的影响规律,建立了光栅刻划机定位系统的模型,采用有限元法进行热变形分析,计算了定位系统的变形量与温度变化量之间的关系。得到了在光栅刻划过程中,环境温度控制在±0.01℃可以保证光栅刻划机定位精度的结论。 (2)在粗定位过程中,计算了外工作台与导轨、滚珠丝杠副、轴承发热量以及定位系统中重要部件的自然对流换热系数。通过热-结构耦合分析研究不同工况下各热载荷对定位精度的影响,得出对定位精度影响最大的因素是来源于滚珠丝杠副的发热量。 (3)对滚珠丝杠副中滚珠圈数、公称直径、导程这三个参数采用三因素三水平正交试验进行多目标优化设计,得出更优的因素水平组合方案,对优化的结果进行验证计算,最终分析结果显示优化后内工作台和丝杠的最大变形量均明显改善。 本课题所做工作和成果将对衍射光栅刻划机定位平台精度的提高具有一定的参考意义。
[Abstract]:Diffraction gratings, as the core devices of spectrometer, are more and more widely used in various fields. Mechanical scribing is an important way to fabricate diffraction gratings, which mainly depends on grating engraving machines. As one of the most precise instruments in mechanical field, grating engraving machine not only has complex structure, but also has many factors affecting its precision. The positioning accuracy of grating engraving machine is an important factor affecting the performance of grating. This paper focuses on the influence of ambient temperature and friction on the positioning accuracy of grating engraving machine. The main contents are as follows: 1) in order to study the influence of environmental temperature change on positioning accuracy, the model of the positioning system of grating engraving machine is established, and the thermal deformation analysis is carried out by using finite element method. The relationship between the deformation of the positioning system and the temperature variation is calculated. It is concluded that in the process of grating drawing, the ambient temperature control at 卤0.01 鈩，

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