关于扫描隧道显微镜系统的研究

发布时间：2018-06-21 00:14

本文选题：扫描隧道显微镜 + 惯性压电马达　；参考：《南京邮电大学》2016年硕士论文

【摘要】：扫描探针显微镜(Scanning Probe Microscope,SPM)是各种探针显微镜(原子力显微镜AFM,激光力显微镜LFM,磁力显微镜MFM等等)的统称,是一种用于分析物质表面微观形态的科学仪器,它高度集成了机械加工技艺,量子隧穿原理,自动控制原理,光电感应原理,信号检测技术及高分辨图形处理技术等高新技术和原理。而它最初问世时的雏形是扫描隧道显微镜(Scanning Tunneling Microscope,STM)。“工欲善其事必先利其器”,鉴于目前纳米材料科学的快速发展,对高精度的表面分析仪器工具的需要更加迫切,本文的研究目标是在一定预算成本下,搭建一台高稳定性,高精度,可在大气环境下使用的完整的扫描隧道显微镜系统,因此本文的主要工作包括如下:(1)根据压电材料的逆压电效应,在充分分析目前STM领域内几款主流压电马达的基础上,设计具有自主专利权的,创新的,结构简单,步进稳定的惯性压电马达结构,并购买材料制作成实物,通过实验测试该惯性马达的步进幅度,负载能力,并对实验结果的误差进行理论分析,编写了专利和论文。(2)设计并制作高放大倍率的前置放大器。本系统的前置放大器采用了德州仪器公司的OPA627高性能放大器作为主要元件,设计并搭建了一个二级放大电路作为我们的前置放大器。(3)针对STM系统对外界震动敏感的特点,我们利用金属支架与四根劲度系数相同的粗弹簧搭建了一个二级减震系统。(4)根据设计的惯性压电马达的尺寸以及前置放大器的尺寸,设计并制作了一个高刚性,高稳定性的镜体结构,保证扫描探针的稳定扫描的同时,有效屏蔽了外界噪音和多路马达控制信号对微弱的隧道电流造成的影响(5)根据自主设计的惯性马达工作原理,利用Labview编写了粗步进,细逼近,以及扫描成像程序。
[Abstract]:Scanning Probe Microscope (SPM) is the general name of various probe microscopes (atomic force microscope AFM, laser force microscope LFM, magnetic force microscope MFM, etc.). It is a scientific instrument used to analyze the micromorphology of the surface of the material. It is highly integrated with the mechanical processing technique, the quantum tunneling principle, the automatic control principle, and the photoelectricity. Induction principle, signal detection technology and high resolution graphics processing technology and other high technology and principles. But the initial appearance of it was Scanning Tunneling Microscope (STM). "Good desire for work must be the first". In view of the rapid development of nano material science, high precision surface analysis instrument tools The aim of this paper is to build a complete scanning tunneling microscope system with high stability and high precision and can be used in the atmosphere under a certain budget cost. The main work of this paper is as follows: (1) according to the reverse piezoelectric effect of the piezoelectric material, several main streams in the current STM field are fully analyzed. On the basis of the piezoelectric motor, an inertial piezoelectric motor with independent patent right, innovative, simple structure and stable step is designed, and the purchase material is made into material. Through the experiment test the step amplitude and load capacity of the inertial motor and the theoretical analysis of the error of the experimental results, the patent and paper are written. (2) design and manufacture. The preamplifier for high magnification. The preamplifier of this system uses the TI OPA627 high performance amplifier as the main component, and designs and builds a two stage amplifier as our preamplifier. (3) we use the metal support and four stiffness for the STM system to be sensitive to the external vibration. The crude spring with the same coefficient sets up a two stage damping system. (4) according to the size of the designed inertial piezoelectric motor and the size of the preamplifier, a high rigidity, high stability mirror structure is designed and made to ensure the stable scanning of the scanning probe and the effect shielding the external noise and the multichannel motor control signal to the micro. The influence of weak tunneling current (5) according to the working principle of self designed inertial motor, rough step, fine approximation and scanning imaging program were written by Labview.
【学位授予单位】：南京邮电大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TH742

【相似文献】