基于双频激光干涉反馈的快速精密定位系统

发布时间：2018-06-23 06:44

本文选题：光学测量 + 快速精密定位　；参考：《光学技术》2015年02期

【摘要】：为了实现大量程、高精度测量系统的快速驱动与定位,结合双频激光干涉仪、可回收废气的空气静压导轨、精密滚珠丝杆以及伺服控制系统,研制了一套定位精度高、重复性好的快速精密定位系统。该系统以双频激光干涉仪为测长基准,实时反馈系统工作台位置信息;采用余气回收式空气静压导轨克服了传统气浮导轨余气对激光干涉测量光路系统的影响;在定位过程中引入PID运动控制技术,通过调节伺服控制器的PI参数使系统拥有快速平稳的响应特性。经实验测试,在500mm行程范围内,该系统的轴线双向定位精度可以达到0.266μm,重复定位精度可以达到0.173μm,具有较好地快速响应特性。应用所研制的精密定位系统对一维直线光栅样品进行了扫描,并与用Olympus共焦显微镜测得的数据进行了比对,表明系统具备良好的轴向定位能力。
[Abstract]:In order to realize the fast driving and positioning of a large range and high precision measuring system, a set of high positioning precision was developed, which combined with dual-frequency laser interferometer, air static pressure guide rail with recoverable exhaust gas, precision ball wire rod and servo control system. A fast and precise positioning system with good repeatability. The system uses dual-frequency laser interferometer as the reference to measure the length of the system and feedback the position information of the system's workbench in real time, and overcomes the influence of the residual gas of the traditional air-floating guide rail on the optical path system of laser interferometry by adopting the residual air recovery type air static pressure guide rail. The pid motion control technology is introduced in the positioning process, and the system has fast and stable response characteristics by adjusting the Pi parameters of the servo controller. The experimental results show that in the range of 500mm travel, the accuracy of the system can reach 0.266 渭 m in both directions and 0.173 渭 m in repeated positioning. The system has the characteristics of fast response. The sample of one-dimensional linear grating is scanned by the developed precision positioning system and compared with the data measured by Olympus confocal microscope. It shows that the system has good axial positioning ability.
【作者单位】：北京理工大学光电学院精密光电测试仪器及技术北京市重点实验室;
【基金】：863计划课题(2012AA040507) 国家重大科学仪器设备开发专项项目(2011YQ040136)
【分类号】：TH744.3;TH703.65

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