高精度硅微谐振加速度计工程化设计与实现

发布时间：2018-06-23 17:56

本文选题：硅微谐振加速度计 + 工程化　；参考：《中国惯性技术学报》2016年02期

【摘要】：硅微谐振加速度计因具有小体积优势和高精度潜力,成为硅微惯性传感器研制的热点之一。工程化设计是硅微谐振加速度计从原理样机向成熟产品转化过程中的关键步骤之一。在分析硅微谐振加速度计工作机理的基础上,从工程实用化设计角度出发,提出了一种高精度硅微谐振加速度计工程化设计方法。分别从系统设计、结构设计、控制电路设计和测试与补偿技术等方面进行了分析和对比,讨论了误差来源与改进方法。测试表明,设计的高精度硅微谐振加速度计质量块基频大于3 k Hz,谐振音叉中心频率约18 k Hz,标度因数大于100 Hz/g,量程±40 g,死区小于0.67 mg,带宽大于200 Hz,振动整流误差0.344 mg,零位一次通电稳定性优于50μg,测试结果基本满足工程化应用指标。
[Abstract]:Silicon micro resonant accelerometers have become one of the hotspots in the development of silicon micro inertial sensors due to their small volume advantages and high precision potential. Engineering design is one of the key steps in the process of transforming silicon micro resonant accelerometer from principle prototype to mature product. Based on the analysis of the working mechanism of silicon microresonant accelerometer and from the point of view of practical engineering design, an engineering design method of high precision silicon micro resonant accelerometer is proposed. This paper analyzes and compares the system design, structure design, control circuit design, test and compensation technology, and discusses the error sources and improvement methods. Tests show that The mass frequency of the high precision silicon microresonant accelerometer is more than 3 kHz, the central frequency of the resonant tuning fork is about 18 kHz, the scaling factor is more than 100 Hz / g, the range is 卤40 g, the dead zone is less than 0.67 mg, the bandwidth is more than 200Hz, the error of vibration rectification is 0.344 mg, and the zero position is zero. The stability of the primary power supply is better than 50 渭 g, and the test results basically meet the requirements of engineering application.
【作者单位】：北京航天控制仪器研究所;
【基金】：国防基础科研项目(A0320110013)
【分类号】：TH824.4

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