新型一体式石英振梁加速度计研究

发布时间：2018-07-09 20:29

本文选题：石英振梁加速度计 + 一体式结构　；参考：《东南大学》2016年硕士论文

【摘要】：石英振梁加速度计(QVBA)是一种基于谐振梁力频效应以及石英逆压电效应的加速度传感器,能够直接输出频率,消除了A/D转换带来的误差,可采用微细加工工艺进行批量生产,具有精度高、成本低、体积小、功耗低等优点,在民用、军工、航空航天、勘探等低中高精度领域有着广泛的应用前景。国内外很多研究机构和高校研发了几种典型QVBA结构：基于双梁振梁的分体式结构、基于双梁的一体式结构、基于单梁振梁的一体式结构。本文在这些典型结构的基础之上提出了一种新型一体式QVBA结构,主要由单梁、质量块、挠性铰链、支撑座、隔离框、安装框等组成。在厚度方向振梁和挠性铰链均被腐蚀,挠性铰链位于石英厚度方向的中心位置。单梁工作在面内弯曲模态,受拉或受压时谐振频率发生变化。该新型一体式QVBA结构能够将检测轴方向灵敏度提高近一倍,且能够消除交叉轴方向的加速度干扰。本文首先介绍了QVBA的工作原理以及等效电路,阐释了衡量QVBA质量好坏的性能指标,并对新型一体式QVBA结构进行了力学分析,验证了新型结构设计的合理性。其次,介绍了QVBA敏感元件结构设计,用有限元分析软件加以辅助。随后对电极设计、加工工艺设计以及封装设计进行了阐释,提出了一种两步腐蚀方案。接着用安捷伦阻抗分析仪4294A对制作的敏感元件进行测试。从测试结果可以看出,敏感元件的频率为51kHz左右,标度因数约为55Hz/g,封装后敏感元件的Q值在8000以上。随后设计仿真了双反相器+双共射极串联谐振电路,提高了QVBA的驱动能力和稳定性。最后搭建新型一体式QVBA系统并进行了性能指标测试。从系统测试结果可以看出,新型一体式QVBA结构切实能够提高检测轴方向的灵敏度,标度因数为56.8Hz/g,并且150分钟内1g稳定性及零偏稳定性达到了几十个μg,验证了结构设计以及电路设计的可行性。
[Abstract]:Quartz vibration beam accelerometer (QVBA) is an acceleration sensor based on resonant beam force frequency effect and quartz inverse piezoelectric effect. It can output frequency directly and eliminate the error caused by A / D conversion. With the advantages of high precision, low cost, small volume and low power consumption, it has wide application prospects in civil, military, aerospace, exploration and other low, medium and high precision fields. Many domestic and foreign research institutions and universities have developed several typical QVBA structures: split structure based on double beam vibration beam, integrated structure based on double beam and integrated structure based on single beam vibration beam. On the basis of these typical structures, a new integrated QVBA structure is proposed in this paper, which consists of single beam, mass block, flexible hinge, support seat, isolation frame, installation frame and so on. Both the beam and the flexure hinge are corroded in the thickness direction, and the flexure hinge is located at the center of the thickness direction of quartz. The resonant frequency of a single beam is changed when it is subjected to tension or compression in the in-plane bending mode. The new integrated QVBA structure can double the sensitivity of the detecting axis and eliminate the acceleration interference in the cross axis direction. In this paper, the working principle and equivalent circuit of QVBA are introduced, and the performance index to measure the quality of QVBA is explained. The mechanical analysis of a new type of integrated QVBA structure is carried out, which verifies the rationality of the new structure design. Secondly, the structure design of QVBA sensitive element is introduced, which is aided by finite element analysis software. Then the electrode design, process design and package design are explained, and a two-step corrosion scheme is proposed. Then the sensor was tested with Agilent Impedance Analyzer 4294A. It can be seen from the test results that the frequency of the sensor is about 51 kHz, the scaling factor is about 55 Hz / g, and the Q value of the packaged sensor is above 8000. A series resonant circuit of dual common-emitter is designed and simulated, which improves the driving ability and stability of QVBA. Finally, a new integrated QVBA system is built and the performance index is tested. It can be seen from the system test results that the new integrated QVBA structure can improve the sensitivity of the detection axis. The scaling factor is 56.8 Hz / g, and the stability of 1g and zero-bias reaches dozens of 渭 g in 150 minutes. The feasibility of structural design and circuit design is verified.
【学位授予单位】：东南大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TH824.4

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