大中型SiC非球面反射镜确定性高效加工工艺的研究
发布时间：2018-10-11 10:47
【摘要】：大中型非球面反射镜在地面望远光学系统和空间对地侦查光学系统中广泛应用,需求量日益增加,大中型非球面的加工要求已经从过去的可以加工改变为现在能够快速确定性高效加工。本文以大中型非球面确定性高效加工为出发点,对大中型非球面加工的铣磨阶段和抛光阶段的确定性高效加工方式进行研究。作者结合国家工程任务需求和自身工作需要开展了大中型Si C非球面反射镜确定性高效加工的研究,论文主要完成的工作有:1.超声复合磨削确定性高效加工的研究:分析了超声复合磨削的机理,从原理上证明超声复合磨削的高效性。对金刚石砂轮种类进行分析确定适合Si C反射镜超声复合磨削三阶段加工的金刚石砂轮并进行设计。通过磨削实验确定超声复合磨削Si C材料的各项磨削工艺参数并进行优化,建立了超声复合磨削Si C材料工艺参数数据库。对超声主轴和刀柄进行分析,通过磨削工艺实验证明超声复合磨削的高效性。2.大中型Si C非球面反射镜超声复合确定性磨削的研究:采用系数法和逆向工程法建立非球面高精度模型,根据模型进行加工仿真和刀轴路径规划。在Si C反射镜超声复合磨削加工的过程中利用激光跟踪仪进行在线检测,降低了风险,提高了磨削效率和磨削精度。对工程用Ф800mm Si C非球面反射镜进行超声复合确定性磨削并进行在线检测,磨削效率提高30%以上,磨削精度达到PV值11.2μm,RMS值1.8μm。3.磁介质辅助抛光的研究:设计完成了轮式磁介质辅助抛光模块并进行优化设计,可以直接应用于主轴为BT40锥柄的加工中心。对磁介质辅助抛光工艺参数进行优化,确定了改性Si磁介质辅助抛光的最优工艺参数。轮式磁介质辅助抛光对Φ150mm改性Si平面镜进行确定性抛光实验,最终结果达到PV0.107λ、RMS0.23λ(λ=0.6328μm)。磁介质辅助抛光的研究为磁流变抛光的研究打下良好的基础。4.球形轮式磁流变抛光系统设计和机床设计分析:采用模块化设计理念设计完成了磁流变抛光系统的抛光机构模块和磁流变液循环模块,并对球形轮进行分析。确定了磁流变抛光对机床的性能参数要求,并根据要求对立式加工中心进行重新改造设计和分析。采用千分表找正的方法对球形磁流变抛光去除函数中心进行精密定标,提高了磁流变抛光的确定性。改造完成的立式磁流变数控抛光机床抛光口径Φ400mm的改性Si离轴凸非球面,经过一个周期12小时的磁流变抛光,非球面精度由抛光前的PV0.614λ、RMS0.099λ收敛至PV0.201λ、RMS0.025λ。本文的研究工作提高了大中型Si C非球面反射镜磨削加工效率和非球面磨削精度,减少了后续研磨加工的时间;磁流变抛光的高确定性使改性后的大中型Si C非球面反射镜的抛光效率有了明显提高。
[Abstract]:Large and medium sized aspherical mirrors are widely used in the optical systems of terrestrial telescopes and space-to-ground reconnaissance, and the demand for them is increasing day by day. The machining requirements of large and medium aspheric surfaces have changed from being able to be machined in the past to being able to process rapidly and efficiently. Based on the deterministic and efficient machining of large and medium aspheric surfaces, this paper studies the deterministic and efficient machining methods in milling and polishing stages of large and medium aspheric surfaces. In this paper, the deterministic and efficient fabrication of large and medium-sized Si C aspheric mirrors is studied in combination with the national engineering task and their own needs. The main work accomplished in this paper is as follows: 1. Research on deterministic high efficiency machining of ultrasonic composite grinding: the mechanism of ultrasonic composite grinding is analyzed, and the high efficiency of ultrasonic composite grinding is proved in principle. The type of diamond grinding wheel is analyzed and the diamond grinding wheel suitable for Si C mirror ultrasonic composite grinding is determined and designed. The grinding parameters of ultrasonic composite grinding Si C material were determined and optimized by grinding experiment. The database of ultrasonic composite grinding Si C material process parameters was established. The ultrasonic spindle and cutter handle are analyzed and the high efficiency of ultrasonic composite grinding is proved by grinding experiment. 2. Study on ultrasonic composite deterministic grinding of large and medium-sized Si C aspheric reflector: the high precision model of aspheric surface is established by coefficient method and reverse engineering method. Machining simulation and tool path planning are carried out according to the model. In the process of ultrasonic combined grinding of Si C mirror, laser tracker is used for on-line inspection, which reduces the risk and improves the grinding efficiency and precision. Ultrasonic composite deterministic grinding of 800mm Si C aspheric reflector used in engineering is carried out. The grinding efficiency is improved by more than 30%, and the grinding accuracy is up to 11.2 渭 m ~ (-1) 渭 m ~ (-1). The research of magnetic medium assisted polishing: the module of wheel medium assisted polishing is designed and optimized, which can be directly applied to the machining center with BT40 taper handle. The optimum process parameters of modified Si medium assisted polishing were determined by optimizing the process parameters. A deterministic polishing experiment on 桅 150mm modified Si plane mirror was carried out by using wheeled magnetodielectric assisted polishing. The final results reached PV0.107 位, RMS0.23 位 (位 = 0.6328 渭 m). The research of magnetic medium aided polishing has laid a good foundation for the research of magnetorheological polishing. 4. Design and Analysis of spherical Wheel Magnetorheological polishing system and Machine tool Design: the polishing mechanism module and the magnetorheological fluid cycle module of the magnetorheological polishing system are designed by using the modular design concept, and the spherical wheel is analyzed. The requirements of the performance parameters of Mr polishing for machine tools are determined, and the design and analysis of the remade machining centers are carried out according to the requirements. The precision calibration of the removal function center of spherical magnetorheological polishing (MRP) is carried out by using the calibration method of the millmeter, which improves the certainty of MRP. The modified Si off-axis convex aspherical surface of the polishing caliber 桅 400mm of the modified vertical magnetorheological NC polishing machine was completed. The aspheric precision converged from PV0.614 位, RMS0.099 位 to PV0.201 位, RMS0.025 位 after 12 hours of magnetorheological polishing with a cycle of 12 hours. The research work in this paper improves the grinding efficiency and accuracy of the large and medium-sized Si C aspheric mirror, and reduces the time of subsequent grinding. The high certainty of magnetorheological polishing improves the polishing efficiency of the modified Si C aspheric mirror.
【学位授予单位】：中国科学院研究生院(长春光学精密机械与物理研究所)
【学位级别】：博士
【学位授予年份】：2015
【分类号】：TH74
[Abstract]:Large and medium sized aspherical mirrors are widely used in the optical systems of terrestrial telescopes and space-to-ground reconnaissance, and the demand for them is increasing day by day. The machining requirements of large and medium aspheric surfaces have changed from being able to be machined in the past to being able to process rapidly and efficiently. Based on the deterministic and efficient machining of large and medium aspheric surfaces, this paper studies the deterministic and efficient machining methods in milling and polishing stages of large and medium aspheric surfaces. In this paper, the deterministic and efficient fabrication of large and medium-sized Si C aspheric mirrors is studied in combination with the national engineering task and their own needs. The main work accomplished in this paper is as follows: 1. Research on deterministic high efficiency machining of ultrasonic composite grinding: the mechanism of ultrasonic composite grinding is analyzed, and the high efficiency of ultrasonic composite grinding is proved in principle. The type of diamond grinding wheel is analyzed and the diamond grinding wheel suitable for Si C mirror ultrasonic composite grinding is determined and designed. The grinding parameters of ultrasonic composite grinding Si C material were determined and optimized by grinding experiment. The database of ultrasonic composite grinding Si C material process parameters was established. The ultrasonic spindle and cutter handle are analyzed and the high efficiency of ultrasonic composite grinding is proved by grinding experiment. 2. Study on ultrasonic composite deterministic grinding of large and medium-sized Si C aspheric reflector: the high precision model of aspheric surface is established by coefficient method and reverse engineering method. Machining simulation and tool path planning are carried out according to the model. In the process of ultrasonic combined grinding of Si C mirror, laser tracker is used for on-line inspection, which reduces the risk and improves the grinding efficiency and precision. Ultrasonic composite deterministic grinding of 800mm Si C aspheric reflector used in engineering is carried out. The grinding efficiency is improved by more than 30%, and the grinding accuracy is up to 11.2 渭 m ~ (-1) 渭 m ~ (-1). The research of magnetic medium assisted polishing: the module of wheel medium assisted polishing is designed and optimized, which can be directly applied to the machining center with BT40 taper handle. The optimum process parameters of modified Si medium assisted polishing were determined by optimizing the process parameters. A deterministic polishing experiment on 桅 150mm modified Si plane mirror was carried out by using wheeled magnetodielectric assisted polishing. The final results reached PV0.107 位, RMS0.23 位 (位 = 0.6328 渭 m). The research of magnetic medium aided polishing has laid a good foundation for the research of magnetorheological polishing. 4. Design and Analysis of spherical Wheel Magnetorheological polishing system and Machine tool Design: the polishing mechanism module and the magnetorheological fluid cycle module of the magnetorheological polishing system are designed by using the modular design concept, and the spherical wheel is analyzed. The requirements of the performance parameters of Mr polishing for machine tools are determined, and the design and analysis of the remade machining centers are carried out according to the requirements. The precision calibration of the removal function center of spherical magnetorheological polishing (MRP) is carried out by using the calibration method of the millmeter, which improves the certainty of MRP. The modified Si off-axis convex aspherical surface of the polishing caliber 桅 400mm of the modified vertical magnetorheological NC polishing machine was completed. The aspheric precision converged from PV0.614 位, RMS0.099 位 to PV0.201 位, RMS0.025 位 after 12 hours of magnetorheological polishing with a cycle of 12 hours. The research work in this paper improves the grinding efficiency and accuracy of the large and medium-sized Si C aspheric mirror, and reduces the time of subsequent grinding. The high certainty of magnetorheological polishing improves the polishing efficiency of the modified Si C aspheric mirror.
【学位授予单位】：中国科学院研究生院(长春光学精密机械与物理研究所)
【学位级别】：博士
【学位授予年份】：2015
【分类号】：TH74
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