利用测温电路线性补偿MEMS加速度计零偏温漂
发布时间：2018-10-12 19:26
【摘要】：为提高MEMS加速度计温度稳定性,针对MEMS加速度计零偏温度漂移问题,提出了一种基于闭环点位置控制的零偏温漂抑制方法,该方法利用测温电路生成线性控制电压,在不同温度下将闭环点位置控制于零反馈位置附近,此时闭环加速度计的零偏近似为0,在全温范围内的零偏漂移量可显著降低。对闭环MEMS加速度计进行温度循环试验,试验结果表明,加入线性控制电压后闭环加速度计的零偏温漂下降到0.1 mg/℃以内,与不加线性控制电压相比提高了一个数量级以上。该方法实现简单,可操作性强,无需额外硬件开销,利于工程化实现。
[Abstract]:In order to improve the temperature stability of MEMS accelerometer, aiming at the problem of zero bias temperature drift of MEMS accelerometer, a zero bias temperature drift suppression method based on closed loop point position control is proposed. The method uses temperature measurement circuit to generate linear control voltage. When the closed loop position is controlled near the zero feedback position at different temperatures, the zero bias of the closed loop accelerometer is approximately 0, and the zero bias drift can be significantly reduced in the whole temperature range. The temperature cycling test of the closed loop MEMS accelerometer is carried out. The experimental results show that the zero bias temperature drift of the closed loop accelerometer decreases to less than 0. 1 mg/ 鈩，
本文编号：2267318
[Abstract]:In order to improve the temperature stability of MEMS accelerometer, aiming at the problem of zero bias temperature drift of MEMS accelerometer, a zero bias temperature drift suppression method based on closed loop point position control is proposed. The method uses temperature measurement circuit to generate linear control voltage. When the closed loop position is controlled near the zero feedback position at different temperatures, the zero bias of the closed loop accelerometer is approximately 0, and the zero bias drift can be significantly reduced in the whole temperature range. The temperature cycling test of the closed loop MEMS accelerometer is carried out. The experimental results show that the zero bias temperature drift of the closed loop accelerometer decreases to less than 0. 1 mg/ 鈩，
本文编号：2267318
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