投影物镜热效应的快速求解算法
发布时间：2018-11-02 18:28
【摘要】：为了加快投影物镜内部温度场和表面变形的求解速度,提出了一种快速求解算法。获得不同入射光强分布与透镜温度场及应变场之间的转换矩阵,对入射光强分布进行多项式分解,并将多项式系数与转换矩阵相乘实现镜片内部节点温度及表面面形变化的快速求解。通过求解三片不同类型透镜的节点温度与表面变形,验证了这一算法的求解精度与计算时间:直接进行有限元求解时,计算时间为600s;而快速求解法的求解时间缩短至0.2s,且它的计算时间不随节点数量的增多而增加。快速求解法对温度的求解精度可以达到0.002℃,对面形Zernike系数的求解精度可以达到0.005nm,能够满足像差求解过程对温度与面形求解精度提出的要求。
[Abstract]:In order to speed up the solution of the internal temperature field and surface deformation of the projection objective, a fast algorithm is proposed. The transformation matrix between the intensity distribution of the incident light and the temperature field and strain field of the lens is obtained, and the distribution of the incident light intensity is decomposed by polynomial. By multiplying the polynomial coefficient and the transformation matrix, the fast solution of the temperature and the surface shape change of the lens is realized. The accuracy and calculation time of the algorithm are verified by solving the node temperature and surface deformation of three different types of lenses. The calculation time is 600 s when the finite element method is directly applied; The fast solution time is reduced to 0.2 s, and the calculation time does not increase with the increase of the number of nodes. The precision of the fast solution method for temperature can reach 0.002 鈩，
本文编号：2306606
[Abstract]:In order to speed up the solution of the internal temperature field and surface deformation of the projection objective, a fast algorithm is proposed. The transformation matrix between the intensity distribution of the incident light and the temperature field and strain field of the lens is obtained, and the distribution of the incident light intensity is decomposed by polynomial. By multiplying the polynomial coefficient and the transformation matrix, the fast solution of the temperature and the surface shape change of the lens is realized. The accuracy and calculation time of the algorithm are verified by solving the node temperature and surface deformation of three different types of lenses. The calculation time is 600 s when the finite element method is directly applied; The fast solution time is reduced to 0.2 s, and the calculation time does not increase with the increase of the number of nodes. The precision of the fast solution method for temperature can reach 0.002 鈩，
本文编号：2306606
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