高Q值氟化钙盘腔的加工与耦合测试
发布时间：2018-11-09 14:13
【摘要】：光学微腔作为光学研究的重要工具具有广泛的应用前景,对信息技术产业进步有巨大的推动作用。光学微腔通过回音壁模式将光限制在很小的范围内进行传播,因而具有具有极高的品质因数、极小的模式体积和极窄的谱线宽度等特点。由于具备这些独特的优势,回音壁模式光学微腔成为光学微腔的研究热点,并已经得到了广泛的应用。目前光学微腔在低阈值激光器、高灵敏度传感器、窄线宽滤波器等方面得到了广泛而深入地研究,受到了人们的广泛关注。本文主要对超纯单晶氟化钙盘型腔进行了理论研究和实验研究。在回音壁模式微腔的研究背景、发展现状和应用现状的基础上,提出了本文的研究内容。首先重点阐述了氟化钙盘型腔的各项性能参数和损耗机制,进一步分析得出晶体光学微腔品质因数(Q)的主要限制因素是表面粗糙度和表面不洁净损耗。在理论研究的基础上,提出了用机械加工结合化学机械抛光制备氟化钙盘型腔的方法。详细介绍了氟化钙盘型腔的制备过程并分析了影响盘型腔表面质量的因素。氟化钙盘型腔制备完成以后,用共聚焦显微镜LEXT OLS4100对其粗糙度进行测试。粗糙度测试结果表明,该氟化钙盘型腔的粗糙度为53nm,达到了纳米级别的表面粗糙度。为了进一步测试氟化钙盘型腔的性能,搭建了氟化钙盘型腔耦合测试系统,测试结果表明所加工的氟化钙盘型的Q值为2.1×106。将实验研究结果和理论研究结果相结合可以得出结论:通过改进氟化钙盘型腔的加工方法和测试环境可以进一步提高氟化钙盘型腔的Q值。
[Abstract]:As an important tool of optical research, optical microcavity has a wide application prospect, and has a great role in promoting the development of information technology industry. The optical microcavity has the characteristics of high quality factor, very small mode volume and very narrow spectral line width, which limit the light propagation in a very small range through the echo wall mode. Because of these unique advantages, echo wall mode optical microcavity has become a hot spot in optical microcavity, and has been widely used. At present, optical microcavity has been widely studied in low threshold laser, high sensitivity sensor, narrow linewidth filter and so on. In this paper, the theoretical and experimental study on the cavity of ultra-pure single crystal calcium fluoride has been carried out. Based on the background, development and application of the microcavity, the research content of this paper is put forward. Firstly, the performance parameters and loss mechanism of calcium fluoride disk cavity are described. The main limiting factors of (Q) are surface roughness and surface unclean loss. On the basis of theoretical research, a method of preparing calcium fluoride disk cavity by mechanical processing and chemical mechanical polishing is proposed. The preparation process of calcium fluoride disk cavity was introduced in detail, and the factors influencing the surface quality of the disc cavity were analyzed. The roughness of calcium fluoride disk cavity was measured by confocal microscope (LEXT OLS4100) after preparation. The results of roughness measurement show that the roughness of the cavity is 53 nm, which reaches the surface roughness of nanometer level. In order to further test the performance of calcium fluoride disk cavity, a coupling testing system of calcium fluoride disk cavity was set up. The test results show that the Q value of the fabricated calcium fluoride disk cavity is 2.1 脳 10 6. By combining the experimental results with the theoretical results, it can be concluded that the Q value of the calcium fluoride disk cavity can be further improved by improving the processing method and testing environment.
【学位授予单位】：中北大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TH703
[Abstract]:As an important tool of optical research, optical microcavity has a wide application prospect, and has a great role in promoting the development of information technology industry. The optical microcavity has the characteristics of high quality factor, very small mode volume and very narrow spectral line width, which limit the light propagation in a very small range through the echo wall mode. Because of these unique advantages, echo wall mode optical microcavity has become a hot spot in optical microcavity, and has been widely used. At present, optical microcavity has been widely studied in low threshold laser, high sensitivity sensor, narrow linewidth filter and so on. In this paper, the theoretical and experimental study on the cavity of ultra-pure single crystal calcium fluoride has been carried out. Based on the background, development and application of the microcavity, the research content of this paper is put forward. Firstly, the performance parameters and loss mechanism of calcium fluoride disk cavity are described. The main limiting factors of (Q) are surface roughness and surface unclean loss. On the basis of theoretical research, a method of preparing calcium fluoride disk cavity by mechanical processing and chemical mechanical polishing is proposed. The preparation process of calcium fluoride disk cavity was introduced in detail, and the factors influencing the surface quality of the disc cavity were analyzed. The roughness of calcium fluoride disk cavity was measured by confocal microscope (LEXT OLS4100) after preparation. The results of roughness measurement show that the roughness of the cavity is 53 nm, which reaches the surface roughness of nanometer level. In order to further test the performance of calcium fluoride disk cavity, a coupling testing system of calcium fluoride disk cavity was set up. The test results show that the Q value of the fabricated calcium fluoride disk cavity is 2.1 脳 10 6. By combining the experimental results with the theoretical results, it can be concluded that the Q value of the calcium fluoride disk cavity can be further improved by improving the processing method and testing environment.
【学位授予单位】：中北大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TH703
【参考文献】
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1 严英占;吉U，
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