压电微动平台的定位控制

发布时间：2019-03-04 12:50

【摘要】：为使压电微动平台定位速度快、定位精度高,采用复合控制方法来对其进行定位控制。基于保证模型精度并使精度在整个阈值区间变化尽量均匀的要求,来使阈值最优化,进而建立了压电微动平台的迟滞模型。基于所建平台迟滞模型,设计了其前馈控制器;为抑制平台的超调,在常规数字增量式PID中引入滤波器设计了其反馈控制器;将前馈控制与PID反馈控制相结合,设计了平台的复合控制器。实验结果表明:所建平台迟滞模型仅有7个算子,且均为有效算子,在16.3μm的最大实测位移下,模型最大误差为0.208μm;在复合控制作用下,平台达到5μm目标值的响应时间为0.173 s,虽慢于前馈控制,但明显快于PID反馈控制;在最大位移为17.155μm的参考输入作用下,若不考虑传感器噪声,平台的定位误差几乎为零。
[Abstract]:In order to make the piezoelectric micro-platform locate quickly and accurately, the compound control method is used to control the positioning. Based on the requirement of ensuring the precision of the model and making the precision change uniformly in the whole threshold range, the threshold value is optimized, and then the hysteresis model of the piezoelectric micro-platform is established. Based on the platform hysteresis model, the feedforward controller is designed, and the feedback controller is designed by introducing the filter into the conventional digital incremental PID to suppress the overshoot of the platform. Combined with feedforward control and PID feedback control, the composite controller of the platform is designed. The experimental results show that there are only seven operators in the platform hysteresis model, and all of them are effective operators. Under the maximum measured displacement of 16.3 渭 m, the maximum error of the model is 0.208 渭 m. Under the compound control, the response time of the platform reaching the target value of 5 渭 m is 0.173 s, which is slower than the feedforward control, but obviously faster than the PID feedback control. Under the reference input with the maximum displacement of 17.155 渭 m, the positioning error of the platform is almost zero without considering the sensor noise.
【作者单位】：宁波大学机械工程与力学学院;浙江省零件轧制成型技术研究重点实验室;
【基金】：国家自然科学基金项目(51175271) 教育部留学回国人员科研启动基金资助项目浙江省高等学校中青年学科带头人学术攀登项目(Pd2013091) 浙江省自然科学基金(LY12E09001)
【分类号】：TH703.8

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