激光外差干涉仪在直线位移台滚转特性测量上的应用
发布时间：2019-03-10 21:28
【摘要】：为了实现工业中较大直线位移上的滚转角快速测量,设计了一种基于激光外差干涉技术的几何空间对称四光路滚转角测量系统,并针对缺少滚转参数的较大行程位移台,进行了滚转特性测量试验。试验证明,几何空间对称四光路滚转角测量系统稳定性好,抗干扰能力强,不仅有效消除了其它自由度误差的串扰,还能够高效地测出不同精度直线位移台的滚转特性,并灵敏地再现了直线位移台工作条件发生改变时工作台滚转角变化。使用常用的2π/512细分的相位计和宽度为120mm的楔面反射镜,系统角测量分辨率为0.8″,最大可测行程达到6m。若将相位计细分提高100倍,滚转角的测量分辨率将达到0.008″。当楔面反射镜宽度提高1倍,最大可测行程超过10m。
[Abstract]:In order to realize the rapid measurement of roll angle on large linear displacement in industry, a geometric symmetry four light path roll angle measurement system based on laser heterodyne interference technique is designed, and aiming at the larger stroke displacement table without rolling parameters, the paper presents a method for measuring the roll angle of geometric space symmetrical four light path based on laser heterodyne interferometry. The rolling characteristic measurement test was carried out. The test results show that the measuring system has good stability and anti-interference ability. It can not only eliminate crosstalk of other degrees of freedom errors, but also can efficiently measure the rolling characteristics of linear displacement stations with different accuracy. The rolling angle of the table is changed sensitively when the working conditions of the linear displacement table are changed. Using the commonly used 2 蟺 / 512 subdivision phasor and wedge reflector with the width of 120mm, the system angle measurement resolution is 0.8 ", and the maximum measurable stroke is 6 m. If the subdivision of the phasemeter is increased by 100 times, the measuring resolution of the roll angle will reach 0.008 ". When the width of the wedge reflector is doubled, the maximum measurable travel is more than 10 m.
【作者单位】： 上海理工大学光电信息与计算机工程学院;
【基金】：沪江基金资助项目(项目编号:C14002)
【分类号】：TH744.3
本文编号：2438044
[Abstract]:In order to realize the rapid measurement of roll angle on large linear displacement in industry, a geometric symmetry four light path roll angle measurement system based on laser heterodyne interference technique is designed, and aiming at the larger stroke displacement table without rolling parameters, the paper presents a method for measuring the roll angle of geometric space symmetrical four light path based on laser heterodyne interferometry. The rolling characteristic measurement test was carried out. The test results show that the measuring system has good stability and anti-interference ability. It can not only eliminate crosstalk of other degrees of freedom errors, but also can efficiently measure the rolling characteristics of linear displacement stations with different accuracy. The rolling angle of the table is changed sensitively when the working conditions of the linear displacement table are changed. Using the commonly used 2 蟺 / 512 subdivision phasor and wedge reflector with the width of 120mm, the system angle measurement resolution is 0.8 ", and the maximum measurable stroke is 6 m. If the subdivision of the phasemeter is increased by 100 times, the measuring resolution of the roll angle will reach 0.008 ". When the width of the wedge reflector is doubled, the maximum measurable travel is more than 10 m.
【作者单位】： 上海理工大学光电信息与计算机工程学院;
【基金】：沪江基金资助项目(项目编号:C14002)
【分类号】：TH744.3
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