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准相位型光子筛的设计与成像特性研究

发布时间:2019-04-24 10:14
【摘要】:光子筛是近10年发展起来的一种新型的衍射光学成像器件,它用微孔环带阵列代替菲涅尔波带片中的透明环带,每一个微孔的衍射光在光子筛后的相应位置同相叠加,大大提高了光子筛的聚焦特性,并且可以有效抑制聚焦光斑的旁瓣,提高分辨率,使得成像质量有了很大提高。光子筛具有以下优点:体积小、重量轻、设计灵活、分辨率高、光谱范围宽、制成阵列容易。它的光谱范围涉及了传统的折反射光学器件难以覆盖的的光波段(包括可见光、红外光、软X射线和极紫外光)。本文针对准相位型光子筛进行了深入研究,研究内容和创新之处被概括为如下几点:1、对光子筛进行了成像理论分析,并做了公式推导,推导出入射光通过任意微孔在焦平面的光场分布表达式,还推导了光子筛的微孔位置分布以及孔径大小与焦点处衍射场振幅的关系。2、通过对光子筛的仿真,得到光子筛的示意图、焦平面光强图和沿光轴方向光强分布图,仿真结果表明光子筛具有极好的聚焦特性,能有效地抑制菲涅尔波带片成像时的高阶衍射和旁瓣效应。3、对光子筛的微孔位置分布进行了窗函数优化,通过比较不同窗函数优化后的效果选取最合适的窗函数。通过改变微孔孔径大小观察焦平面的光强分布得到最佳的d/w比值。4、分析了光子筛的色散特性,当增大波长或减小波长时,光斑能量都急剧降低,表明光子筛具有良好的波长选择性。还分析了一些误差对光子筛成像的影响。5、简要介绍了光子筛的制作加工方法,对可见光光子筛进行了成像实验,包括对聚焦特性的测试,对成像特性的测试,对分辨率板的测试,对光谱透过率的测试,最终得到的结果都与理论结果基本符合。
[Abstract]:Photonic screen is a new kind of diffractive optical imaging device which has been developed in recent 10 years. It replaces the transparent ring band in Fresnel zone plate with microporous ring band array, and the corresponding position of diffracted light of each micropore is superposed in the corresponding position after photon screen, in which the transparent ring band in the Fresnel zone plate is replaced by the microporous ring band array. The focusing property of the photonic screen is greatly improved, and the sidelobe of the focusing spot can be effectively suppressed, and the resolution of the focus spot can be improved. The imaging quality is greatly improved. Photonic screen has the following advantages: small size, light weight, flexible design, high resolution, wide spectral range, easy array. Its spectral range is related to the optical bands (including visible light, infrared light, soft X-ray and polar UV) that are difficult to cover by the traditional refractive reflection optical devices (including visible light, infrared light, soft X-ray and polar ultraviolet light). The research contents and innovations of the quasi-phase type photonic screen are summarized as follows: 1. The imaging theory of the photonic screen is analyzed and the formula is deduced, and the research content and innovation are summarized as follows: (1) the imaging theory of the photonic screen is analyzed and the formula is deduced. The expression of light field distribution in focal plane through arbitrary micropores is derived, and the distribution of micropore position and the relationship between aperture size and the amplitude of diffraction field at focal point are also derived. 2. The simulation of photon screen is carried out. The schematic diagram, the focal plane light intensity diagram and the light intensity distribution along the optical axis are obtained. The simulation results show that the photon screen has excellent focusing characteristics and can effectively suppress the high order diffraction and sidelobe effect in Fresnel zone plate imaging. The window function is optimized for the micropore position distribution of the photon screen, and the most suitable window function is selected by comparing the effects of different window functions. The optimum d / w ratio is obtained by changing the pore size to observe the light intensity distribution in the focal plane. 4. The dispersion characteristics of the photonic screen are analyzed. When the wavelength is increased or the wavelength is reduced, the spot energy decreases sharply. The results show that the photonic screen has good wavelength selectivity. The influence of some errors on the photon screen imaging is also analyzed. 5. The fabrication and processing methods of the photonic screen are briefly introduced. The imaging experiments of the visible light photon screen are carried out, including the measurement of the focusing characteristics and the measurement of the imaging characteristics. The results of the measurement of the resolution plate and the spectral transmittance are basically in agreement with the theoretical results.
【学位授予单位】:浙江大学
【学位级别】:硕士
【学位授予年份】:2016
【分类号】:TH74

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