具有耦合补偿功能的大行程二维柔性平台

发布时间：2019-05-07 02:50

【摘要】：设计了一种基于双级复合平行板簧结构的大行程二维并联微位移平台,以解决二维柔性平台尺寸大、行程小,运动耦合误差大,运动性能受加工误差影响等问题。设计的微位移平台在每个运动方向均采用两个音圈电机同时驱动,通过调节两音圈电机信号比例来补偿加工误差造成的运动耦合误差,完成X和Y方向的运动解耦,从而降低系统对加工精度的依赖程度。根据卡氏第二定理建立了平台力学模型,优化了平台尺寸参数,并利用有限元仿真对设计的平台性能进行验证。最后,搭建了微位移定位系统实验平台。实验结果表明:设计的柔性平台行程与平台尺寸占比大,定位精度高,运动解耦性能得到大幅改善,实现了±2.25mm×±2.27mm工作行程,工作行程与平台尺寸占比约为1.73%,运动耦合误差小于0.27%。
[Abstract]:A large-stroke two-dimensional parallel micro-displacement platform based on two-stage compound parallel plate spring structure is designed to solve the problems of large size, small stroke, large motion coupling error and motion performance affected by machining error of the two-dimensional flexible platform. The designed micro-displacement platform is driven simultaneously by two pitch motors in each direction of motion. The motion coupling error caused by machining error is compensated by adjusting the signal ratio of the two-coil motor, and the motion decoupling in X and Y directions is completed. As a result, the dependence of the system on machining accuracy is reduced. According to the second Cartesian theorem, the mechanical model of the platform is established, and the dimension parameters of the platform are optimized, and the performance of the designed platform is verified by finite element simulation. Finally, the experimental platform of micro-displacement positioning system is built. The experimental results show that the designed flexible platform has a large ratio of stroke to platform size, high positioning accuracy, and greatly improved motion decoupling performance. The 卤2.25mm 脳 卤2.27mm working stroke is realized, and the ratio of working stroke to platform size is about 1.73%. The motion coupling error is less than 0.27%.
【作者单位】： 山东大学机械工程学院高效洁净机械制造教育部重点实验室;北京航空航天大学自动化科学与电气工程学院;
【基金】：国家自然科学基金资助项目(No.61327003) 山东大学基本科研业务费专项资金资助项目(No.2015JC034)
【分类号】：TH703
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本文编号：2470708