可调支撑力对光学元件面形的影响

发布时间：2019-05-23 09:10

【摘要】：可调支撑装置是高精度光学元件的常用支撑结构。分析了可调支撑装置支撑力调节对光学元件面形的影响规律。建立可调支撑装置的力学模型,利用有限元法计算光学元件的变形,并对光学元件面形进行Zernike多项式拟合。不同工况下分析结果表明:均匀支撑时光学元件面形均方根(RMS)最小,可调支撑力变化时,引入的光学元件面形RMS以及主要Zernike多项式系数均与支撑力线性相关,与光学元件的初始支撑状态无关。建立Fringe Zernike系数随任意支撑力变化的敏感度矩阵,采用该矩阵预测随机工况下光学元件支撑力调整后面形,预测调节面形与有限元仿真调节面形基本一致,RMS误差优于0.3%,为可调支撑装置的设计与装调提供理论依据。
[Abstract]:Adjustable support device is a common support structure for high precision optical elements. The influence of adjustable support force adjustment on the surface shape of optical elements is analyzed. The mechanical model of the adjustable supporting device is established, the deformation of the optical element is calculated by the finite element method, and the surface shape of the optical element is fitted by Zernike multinomial. The analysis results under different working conditions show that the surface shape mean square root (RMS) of optical elements is the smallest under uniform support, and the surface shape RMS and main Zernike multinomial coefficients of optical elements are linearly correlated with the support force when the adjustable support force changes. Independent of the initial support state of the optical element. The sensitivity matrix of Fringe Zernike coefficient with arbitrary support force is established. The matrix is used to predict the back shape of optical element support force adjustment under random working conditions. The predicted adjustment surface shape is basically consistent with the finite element simulation adjustment surface shape, and the RMS error is better than 0.3%. It provides a theoretical basis for the design and installation of adjustable support devices.
【作者单位】：中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室超精密光学工程研究中心;
【基金】：国家重大专项02专项(2009ZXO2205)
【分类号】：TH74

【共引文献】