用于空间太阳望远镜的双波段极紫外反射镜

发布时间：2019-06-28 19:47

【摘要】：Fe-IX/X(λ=17.1nm)和He-II(λ=30.4nm)是太阳辐射的两条重要谱线,极紫外(EUV)空间太阳望远镜通常选择这两条谱线对日冕进行观测。为了实现在同一块反射镜对上述两条谱线同时具有较高的反射率,设计了多层膜膜系结构。首先根据极紫外波段选材原则选择了Si、B4C和Mo 3种材料,构成B4C/Si和Mo/Si叠加的两种周期结构,优化其周期数、膜层厚度等,计算了反射率曲线,并从理论验证了其可行性;然后利用磁控溅射镀膜机,在Si片上镀制了多层膜;最后用激光等离子体反射率计检测了样片的反射率,结果显示,在波长17.1nm和30.4nm处的反射率分别达到19.9%和20.2%。通过选择不同滤光片,如Mg、Al/Zr滤光片,可以获得17.1nm或30.4nm单一谱线的反射,实现了设计目标。
[Abstract]:Fe-IX/X (位 = 17.1nm) and He-II (位 = 30.4nm) are two important spectral lines of solar radiation. Extremely ultraviolet (EUV) space solar telescopes usually select these two lines to observe the corona. In order to realize the high reflectivity of the same mirror to the above two lines at the same time, a multi-layer film system structure is designed. Firstly, according to the principle of extreme ultraviolet band material selection, three kinds of materials, Si,B4C and Mo, were selected to form two kinds of periodic structures superimposed by B4C/Si and Mo/Si, their period number and film thickness were optimized, and the reflectivity curve was calculated and verified theoretically, and then the multi-layer films were deposited on Si sheets by magnetron sputter coating machine. Finally, the reflectivity of the sample was measured by laser plasma reflectivity meter. The results show that the reflectivity at wavelength 17.1nm and 30.4nm is 19.9% and 20.2%, respectively. By selecting different filters, such as Mg,Al/Zr filter, the reflection of 17.1nm or 30.4nm single spectral line can be obtained, and the design goal can be realized.
【作者单位】：中国科学院长春光学精密机械与物理研究所光学系统先进制造技术重点实验室;
【基金】：国家自然科学基金(60478035)资助项目
【分类号】：TH743

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