石英摆片设计与化学腐蚀加工技术
发布时间：2019-07-08 13:47
【摘要】：石英挠性加速度计作为一种高精度机械式线性加速度计，是目前惯性导航系统中重要的传感器。石英摆片是它的心脏，起敏感加速度作用。石英属于硬脆材料，它与金属材料不同，具有低塑性、易碎性和微裂纹等缺点，且石英摆片形状复杂、几何尺寸精度和表面质量要求很高，使得石英摆片采用传统的金属加工方法很难进行加工，存在着加工效率低、工件易破碎、能耗大、加工质量差、许多设计要求无法实现等问题。本文针对这些问题，对石英摆片进行了设计，并研究了其化学腐蚀方法与下垂量检测技术。 本文的主要研究内容如下： 第一章，综述了国内外石英摆片加工技术的发展状况和石英摆片检测技术国内外现状，比较了目前石英摆片各种加工方法和各种检测技术的优缺点，提出了本文的主要研究内容和课题的研究意义。 第二章，介绍了石英挠性加速度计的结构与工作原理，建立了石英挠性加速度计的动力学方程、传递函数和静态数学模型，了解了石英摆片的各项参数对其性能的影响。介绍了石英材料的特性，，设计了石英摆片的结构，对石英摆片的载荷进行了计算。 第三章，提出静力分析和模态分析的理论模型，用ANSYS软件建立了石英摆片的有限元模型，针对不同厚度挠性梁的石英摆片进行了静力分析，得到了不同厚度的挠性梁在相同载荷下的应变和应力；对石英摆片进行了模态分析，得到前五阶模态的频率和振型，通过改善石英摆片尺寸，防止石英摆片与环境共振，保证石英挠性加速度计的测量精度。 第四章，从氢氟酸溶液特征、石英材料的表面特征、反应机理及反应分子模型三个方面介绍了石英摆片化学腐蚀原理，分析了石英摆片化学腐蚀实验的工艺流程，包括腐蚀液的选择、保护层及设备的选择以及加工过程的控制，介绍了石英摆片挠性梁厚度的测量方法。进行了化学腐蚀加工试验，然后测量了试验样品的挠性梁厚度，试验结果表明，石英摆片挠性梁的加工采用化学腐蚀加工工艺是成功的。 第五章，介绍了石英摆片下垂量的概念，并对其进行了理论计算，提出了下垂量检测原理，介绍了计算机视觉检测技术，对下垂量检测系统进行了总体的设计，介绍了装置中用到零部件，对搭建完成的下垂量检测平台实物进行了描述；最后对化学腐蚀加工后的石英摆片进行下垂量检测试验，分析了试验结果，证明了化学腐蚀加工后的石英摆片的质量是合格的，同时也验证了有限元静力分析和下垂量理论计算的准确性。 最后总结了论文的主要研究内容，并对石英摆片的化学腐蚀方法和下垂量检测技术的进一步研究工作进行了探讨和展望。
文内图片：
图片说明：各种加速度计性能及应用领域图
[Abstract]:Quartz flexible accelerometer, as a high precision mechanical linear accelerometer, is an important sensor in inertial navigation system. The quartz pendulum is its heart and acts as a sensitive acceleration. Quartz is a kind of hard and brittle material, which is different from metal material, has the shortcomings of low plasticity, fragility and microcrack, and the shape of quartz pendulum is complex, the geometric dimension accuracy and surface quality requirements are very high, which makes it difficult to process quartz pendulum by traditional metal processing method. There are some problems, such as low machining efficiency, easy breakage of workpiece, high energy consumption, poor machining quality and so on. In order to solve these problems, the quartz pendulum plate is designed, and its chemical corrosion method and sag detection technology are studied. The main research contents of this paper are as follows: in the first chapter, the development of quartz pendulum processing technology at home and abroad and the present situation of quartz pendulum detection technology at home and abroad are reviewed, the advantages and disadvantages of various processing methods and detection technologies of quartz pendulum plate are compared, and the main research contents and significance of this paper are put forward. In the second chapter, the structure and working principle of quartz flexible accelerometer are introduced, the dynamic equation, transfer function and static mathematical model of quartz flexible accelerometer are established, and the influence of various parameters of quartz pendulum on its performance is understood. The characteristics of quartz material are introduced, the structure of quartz pendulum is designed, and the load of quartz pendulum is calculated. In the third chapter, the theoretical models of static analysis and modal analysis are put forward, and the finite element model of quartz pendulum plate is established by ANSYS software. The static analysis of quartz pendulum plate with different thickness of flexible beam is carried out, and the strain and stress of flexible beam with different thickness under the same load are obtained. The modal analysis of quartz pendulum is carried out, and the frequency and vibration mode of the first five modes are obtained. by improving the size of quartz pendulum, the resonance between quartz pendulum and environment is prevented, and the measurement accuracy of quartz flexible accelerometer is guaranteed. In the fourth chapter, the chemical corrosion principle of quartz pendulum plate is introduced from three aspects: hydrofluoric acid solution characteristics, surface characteristics of quartz material, reaction mechanism and reaction molecular model. The technological process of quartz pendulum chemical corrosion experiment is analyzed, including the selection of corrosion solution, the selection of protective layer and equipment, and the control of processing process. The measurement method of quartz pendulum flexible beam thickness is introduced. The chemical corrosion processing test was carried out, and then the thickness of flexible beam of the test sample was measured. The test results show that the chemical corrosion processing process of quartz pendulum flexible beam is successful. In the fifth chapter, the concept of quartz pendulum droop is introduced, and its theoretical calculation is carried out, the principle of sag detection is put forward, the computer vision detection technology is introduced, the overall design of the sag detection system is carried out, the parts used in the device are introduced, and the object of the droop detection platform built is described. Finally, the sag test of quartz pendulum after chemical corrosion is carried out, and the test results are analyzed. it is proved that the quality of quartz pendulum after chemical corrosion is qualified, and the accuracy of finite element static analysis and droop theoretical calculation is also verified. Finally, the main research contents of the paper are summarized, and the chemical corrosion method of quartz pendulum and the further research work of sag detection technology are discussed and prospected.
【学位授予单位】：杭州电子科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TH824.4
本文编号：2511629
文内图片：
图片说明：各种加速度计性能及应用领域图
[Abstract]:Quartz flexible accelerometer, as a high precision mechanical linear accelerometer, is an important sensor in inertial navigation system. The quartz pendulum is its heart and acts as a sensitive acceleration. Quartz is a kind of hard and brittle material, which is different from metal material, has the shortcomings of low plasticity, fragility and microcrack, and the shape of quartz pendulum is complex, the geometric dimension accuracy and surface quality requirements are very high, which makes it difficult to process quartz pendulum by traditional metal processing method. There are some problems, such as low machining efficiency, easy breakage of workpiece, high energy consumption, poor machining quality and so on. In order to solve these problems, the quartz pendulum plate is designed, and its chemical corrosion method and sag detection technology are studied. The main research contents of this paper are as follows: in the first chapter, the development of quartz pendulum processing technology at home and abroad and the present situation of quartz pendulum detection technology at home and abroad are reviewed, the advantages and disadvantages of various processing methods and detection technologies of quartz pendulum plate are compared, and the main research contents and significance of this paper are put forward. In the second chapter, the structure and working principle of quartz flexible accelerometer are introduced, the dynamic equation, transfer function and static mathematical model of quartz flexible accelerometer are established, and the influence of various parameters of quartz pendulum on its performance is understood. The characteristics of quartz material are introduced, the structure of quartz pendulum is designed, and the load of quartz pendulum is calculated. In the third chapter, the theoretical models of static analysis and modal analysis are put forward, and the finite element model of quartz pendulum plate is established by ANSYS software. The static analysis of quartz pendulum plate with different thickness of flexible beam is carried out, and the strain and stress of flexible beam with different thickness under the same load are obtained. The modal analysis of quartz pendulum is carried out, and the frequency and vibration mode of the first five modes are obtained. by improving the size of quartz pendulum, the resonance between quartz pendulum and environment is prevented, and the measurement accuracy of quartz flexible accelerometer is guaranteed. In the fourth chapter, the chemical corrosion principle of quartz pendulum plate is introduced from three aspects: hydrofluoric acid solution characteristics, surface characteristics of quartz material, reaction mechanism and reaction molecular model. The technological process of quartz pendulum chemical corrosion experiment is analyzed, including the selection of corrosion solution, the selection of protective layer and equipment, and the control of processing process. The measurement method of quartz pendulum flexible beam thickness is introduced. The chemical corrosion processing test was carried out, and then the thickness of flexible beam of the test sample was measured. The test results show that the chemical corrosion processing process of quartz pendulum flexible beam is successful. In the fifth chapter, the concept of quartz pendulum droop is introduced, and its theoretical calculation is carried out, the principle of sag detection is put forward, the computer vision detection technology is introduced, the overall design of the sag detection system is carried out, the parts used in the device are introduced, and the object of the droop detection platform built is described. Finally, the sag test of quartz pendulum after chemical corrosion is carried out, and the test results are analyzed. it is proved that the quality of quartz pendulum after chemical corrosion is qualified, and the accuracy of finite element static analysis and droop theoretical calculation is also verified. Finally, the main research contents of the paper are summarized, and the chemical corrosion method of quartz pendulum and the further research work of sag detection technology are discussed and prospected.
【学位授予单位】：杭州电子科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TH824.4
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