非线性微质量传感器设计

发布时间：2018-01-06 02:02

本文关键词：非线性微质量传感器设计　出处：《大连理工大学》2016年硕士论文　论文类型：学位论文

【摘要】：压电谐振式微质量传感器可以根据谐振频率变化称重微小质量,在生物分子、微小颗粒、环境污染和液体成分识别与检测等领域具有广泛的应用前景。借助尺寸微型化方法可以极大的提升悬臂梁式微传感器的灵敏度,但随着尺寸的不断减小,传感器的使用环境要求(如真空环境)也极为苛刻。为此,需要展开新型微质量传感器设计方面的研究。本文利用双稳态结构的参激振动分岔现象设计具有称重和阈值质量监测功能的新型微质量传感器,具体包括：(1)设计了具有称重和阈值质量感应功能的新型微质量传感器,利用激励载荷(幅值、位置和频率)对余弦梁结构动态特性的影响关系,提出基于载荷变换的微质量传感器工作模式切换方法,实现了微质量称重与阈值质量感应功能的转换。研究了质量吸附位置、激励载荷对传感器灵敏度和最小检测阈值的影响关系,建立了多参数耦合作用的传感器最小检测阈值优化模型,得到了具有最高检测灵敏度的双稳态结构参数和激励载荷参数。研究结果表明,在质量称重工作区域,所提出的传感器较两端固支梁式传感器灵敏度提升了4.25倍；在阈值质量检测区域,借助吸附质量变化引起的响应幅值突变特性,无需阻抗分析仪即可实现微质量的快速检测。同时,利用双稳态结构的阈值跳跃特性,提出基于配重法的极微阈值质量检测方法。(2)提出了基于组合梁结构的非线性传感器设计方法,利用线性悬臂梁和非线性余弦梁组合结构,提出了基于幅值突变的跳跃频率检测方法,借助吸附质量前后跳跃频率的变化量来确定被测质量,不仅有效减小了环境阻尼的影响,并且简化测量过程无需复杂的检测电路即可实现微质量快速检测。研究了质量吸附位置、激励频率与激励幅值对系统跳跃频率响应的影响关系,得到了具有最高探测灵敏度的最优组合梁构型、激励载荷和吸附位置。
[Abstract]:The piezoelectric resonant micro mass sensor according to the change in resonant frequency of small weighing quality, in the biological molecules, tiny particles, and has wide application prospect areas of environmental pollution and the liquid component identification and detection. With the help of micro size cantilever lifting method can greatly weakened the sensitivity of the sensor, but with the continuous reduction of the size, the use of sensors environmental requirements (such as vacuum) is extremely harsh. Therefore, the need of new micro mass sensor design. The Vibration Bifurcation Phenomena of bistable structure design has the weight and threshold quality monitoring function of the new micro mass sensor, including: (1) design with weighing and quality threshold the induction function of the new micro mass sensor, using excitation (amplitude, frequency and position) influence on the dynamic characteristics of Yu Xianliang structure, put forward Micro mass sensor working mode switching method of load based on transformation, to realize micro quality weighing conversion and threshold quality sensing function was studied. The quality of adsorption sites, the relationship between incentive effect of load on the sensor sensitivity and minimum detection threshold, an optimization model of multi parameter coupling sensor minimum detection threshold function, the bistable structure and parameters excitation parameters have the highest detection sensitivity is obtained. The results show that the quality of work in the weighing area, the proposed sensor is fixed beam sensor sensitivity is improved by 4.25 times; in the quality threshold detection area, with the characteristics of mutation response amplitude caused by the change of the adsorption quality, achieve rapid detection of micro mass without impedance analyzer can at the same time, the bistable structure threshold jump characteristics, the minimal threshold quality detection method based on weight Method. (2) proposed a nonlinear sensor design method of composite beam structure based on linear and nonlinear cantilever beam Yu Xianliang composite structure, put forward the jump frequency detection method based on amplitude, to determine the quality by means of variation of adsorption quality before and after the jump frequency, not only to reduce the impact of the environmental damping, and simplified the measurement process without complex detection circuit can realize rapid detection of micro quality. The quality of adsorption sites, excitation frequency and excitation amplitude influence system jump frequency response, obtained with the optimal combination of the highest detection sensitivity of beam type, load and adsorption sites.

【学位授予单位】：大连理工大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TP212

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