滑块内滚道型面精度的倾斜测量

发布时间：2018-01-21 23:24

  本文关键词： 测量 激光位移传感器 型面精度测量 椭圆拟合 传感器偏角 位姿　出处：《光学学报》2017年10期 　论文类型：期刊论文

【摘要】：为了实现滑块内滚道型面精度的快速准确测量,提出一种基于激光三角位移传感器倾斜测量的方法。对该方法的算法进行推理与验证,同时借助高精度圆棒进行实验验证。根据测量系统的特征与滑块内滚道的形状,建立相对应的模型。设计相应的算法,计算滑块内滚道的半径,并对测量过程中的误差来源进行标定补偿。在内滚道轮廓算法的基础上,计算滑块内滚道的轴线相对基准面的位置与平行度。介绍该方案的验证性实验并分析结果。实验结果表明:标准圆棒的测量精度为3.75μm,标准差在2μm以内。实验结果满足5μm的测量精度要求,且该测量方式对标定件与待测件没有位姿要求,具备一定的推广性。
[Abstract]:In order to measure the accuracy of the inner raceway profile quickly and accurately, a method of tilt measurement based on laser triangulation displacement sensor is proposed, and the algorithm of this method is inferred and verified. According to the characteristics of the measuring system and the shape of the inner raceway of the slider, the corresponding model is established. The corresponding algorithm is designed to calculate the radius of the inner raceway of the slider. The error sources in the measurement process are calibrated and compensated. The position and parallelism of the axis relative to the datum of the inner raceway of the slider are calculated. The verifiability experiments of the scheme are introduced and the results are analyzed. The experimental results show that the measuring accuracy of the standard rod is 3.75 渭 m. The standard deviation is less than 2 渭 m. The experimental results meet the requirement of measuring precision of 5 渭 m, and the measurement method has no position and pose requirements for the calibrator and the object to be tested, so it has certain extensibility.
【作者单位】： 南京理工大学机械工程学院;数控机床功能部件共性技术工业和信息化部重点实验室;
【基金】：国家重大科技专项(2016ZX04004007)
【分类号】：TG659
【正文快照】： 滚动直线导轨副是数控机床的重要功能部件,其性能对数控机床的整体性能及精度有重要影响。随着滚动直线导轨副的广泛使用,工业上对其精度要求越来越高,将导轨副的精度分配到各个组成构件上,已经1012005-1成为一种必然趋势。滑块是滚动直线导轨副的重要构件,滑块内滚道的型面精，

本文编号：1452856