光场式直线时栅的自适应动态比相测量方法研究

发布时间：2018-02-01 02:17

本文关键词： 时栅自适应位移测量比相分辨率　出处：《重庆理工大学》2017年硕士论文　论文类型：学位论文

【摘要】：位移测量的精度水平是衡量现代工业领域先进程度的重要指标之一,位移传感器是位移测量的关键部件,位移传感器的精度直接决定位移测量的精度。目前,在精密位移测量领域,栅线刻划式的位移传感器被广泛应用,但存在测量精度与速度相互制约的问题。国外高精度传感器的研究制造技术远超我国,我国大多使用的高精度传感器都依赖进口,但仍供不应求。为赶超国外先进水平,只能寻求新思路。时栅是由我国自主开发研制的位移传感器,其本质上是一种等时间采样的静态位移测量传感器,因此,时栅在动态测量中普遍存在分辨率随被测物体运动速度变化的问题。时栅产品中,光场式时栅在抗电磁干扰和频率响应方面具有突出优势,针对上述问题,本课题基于光场式直线时栅设计了一种自适应动态比相位移测量方法。该方法可在不改变激励频率的条件下,利用自适应控制实现测量速度与时栅单位时间内比相次数的自动匹配调节,进而保证在原有精度基础上,实现不同速度下的等分辨率位移测量。本文已取得的创新成果有以下几点:(1)在光场式直线时栅测量原理基础上,分析其动态测量中分辨率随速度变化的问题,提出自适应动态比相测量方法。(2)分析自适应控制算法,结合光场式直线时栅位移测量方法,推导自适应动态比相测量原理,并完成测量系统的设计与实现。(3)搭建实验平台,进行实验研究,通过实验数据对比分析,验证自适应动态比相测量方法的可行性。实验研究表明:自适应动态比相测量方法在量程180mm,速度0~60mm/s的范围内,实现了精度优于±0.5μm的等空间位置反馈测量,同时保证了分辨率不变,为光场式直线时栅在不同速度下的测量分辨率变化问题提供了有效的解决方案。
[Abstract]:The precision level of displacement measurement is one of the important indexes to measure the advanced degree of modern industry. Displacement sensor is the key component of displacement measurement. The precision of displacement sensor directly determines the accuracy of displacement measurement. In the field of precision displacement measurement, grid-line displacement sensor is widely used, but there is the problem of measuring precision and velocity restricting each other. The research and manufacture technology of high-precision sensor in foreign countries is far superior to that in China. Most of the high precision sensors used in our country rely on imports, but the supply is still short of supply. In order to catch up with the advanced level of foreign countries, we can only seek new ideas. The time grating is a displacement sensor developed independently by our country. In essence, it is a static displacement sensor with equal time sampling. Therefore, there is a problem that the resolution varies with the moving velocity of the object in dynamic measurement. The light field time grating has the outstanding superiority in the aspect of resisting electromagnetic interference and frequency response, aiming at the above problems. In this paper, an adaptive dynamic phase contrast displacement measurement method is designed based on the light-field linear time-grating, which can be used to measure the displacement without changing the excitation frequency. The adaptive control is used to realize the automatic matching and adjusting of the measuring speed and the times of phase comparison in the unit time of the time grating, so as to ensure the original accuracy. The results of this paper are as follows: 1) based on the principle of light field linear time grating measurement. Based on the analysis of the problem that the resolution varies with the velocity in the dynamic measurement, an adaptive control algorithm is proposed, which is based on the adaptive dynamic phase comparison measurement method, and the grating displacement measurement method is combined with the light-field straight line method. The principle of adaptive dynamic phase contrast measurement is deduced, and the design and implementation of the measurement system is completed. The experimental platform is set up, and the experimental research is carried out, and the experimental data are compared and analyzed. The experimental results show that the adaptive dynamic phase comparison method is in the range of 180 mm and 0 ~ 60 mm / s. The equal-space position feedback measurement with precision better than 卤0.5 渭 m is realized, and the resolution is invariant, which provides an effective solution to the measurement resolution change problem of the light-field straight line grating at different speeds.
【学位授予单位】：重庆理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TP212

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