驻极体转速传感器研究

发布时间：2018-02-10 06:08

本文关键词： 无机驻极体转速传感器隧穿充电表面电势二氧化硅　出处：《北京交通大学》2017年硕士论文　论文类型：学位论文

【摘要】：随着高速铁路和城市铁路的飞速发展,列车的测速定位问题日趋重要。转速传感器作为高速铁路测速定位系统的核心部件必须能够可靠、高效地工作。目前已有的光电式、磁电式转速传感器对环境要求很高,存在易受外界干扰、安装工艺复杂、使用寿命短、频率响应差等问题。驻极体具有长期保持电荷的能力,使其在传感器领域中有着广泛的应用。本文针对驻极体的特性和实际应用的需要,对基于驻极体的转速传感器的制备工艺和器件进行了分析和研究,研究成果具有潜在的应用价值。论文主要工作如下:1.研究了基于微机电系统(Micro-Electro-Mechanical System,MEMS)的驻极体转速传感器的制作工艺和测量原理,从而提出了一种基于二氧化硅(SiO_2)/氮化硅(Si3N4)/二氧化硅(SiO_2)三明治结构的无机驻极体转速传感器,有望解决现有转速传感器寿命短、工艺复杂等问题。2.在工艺方面,研究了 SiO_2/Si3N4/SiO_2三明治结构驻极体的工艺原理和工艺步骤,降低了转速传感器的结构设计和工艺复杂度,改善了已有器件难以集成和批量生产的问题,与未来传感器微型化、集成化的发展趋势一致。3.对驻极体的驻极工艺进行了研究和测试,对比研究了几种充电方式的原理及方法,并对驻极效果进行测试,测试结果表明隧穿充电后驻极体在恶劣环境中有良好的电荷保持能力。在器件应用方面,利用驻极体保持电荷以及提供稳定电场的特点,对驻极体转速传感器的工作原理进行了分析、仿真和测试,测试及分析结果显示所设计制作的转速传感器能够实现对转速的检测。本文设计的基于SiO_2/Si3N4/SiO_2三明治结构的无机驻极体转速传感器具有制作工艺简单、成本低、尺寸小、分辨率高、能应用于恶劣环境中等优良特性,为MEMS转速传感器提供了新思路,具有广泛的应用前景。
[Abstract]:With the rapid development of high-speed railway and urban railway, the problem of train velocimetry and location is becoming more and more important. As the core component of high-speed railway speed measurement and positioning system, the speed sensor must be able to work reliably and efficiently. The magnetoelectric speed sensor has many problems, such as high environmental requirement, easy external interference, complex installation process, short service life, poor frequency response, etc. The electret has the ability to hold charge for a long time. It has been widely used in sensor field. In this paper, the fabrication technology and devices of electret based rotational speed sensor are analyzed and studied according to the characteristics of electret and the need of practical application. The main work of this paper is as follows: 1. The fabrication technology and measuring principle of electret speed sensor based on Micro-Electro-Mechanical system MEMS (Micro-Electro-Mechanical system MEMS) are studied. Thus, an inorganic electret speed sensor based on the structure of SiO2 / Si3N4 / Si3N4 / SiO2 / SiO2 / SiO2 / SiO2 / SiO2 / SiO2 / SiO2 sandwich structure is proposed, which is expected to solve the problems of short life and complex process of the existing rotating speed sensor. The process principle and process steps of SiO_2/Si3N4/SiO_2 sandwich electret are studied. The structure design and process complexity of speed sensor are reduced, and the problems of hard integration and mass production of existing devices are improved, and the sensor is miniaturized in the future. The development trend of integration is consistent .3.Study and test on the standing electrode technology of electret, compare and study the principle and method of several charging methods, and test the effect of standing electrode. The test results show that the electret after tunneling charging has good charge retention ability in the harsh environment. In the application of the device, the electret can keep the charge and provide the stable electric field. The principle of electret speed sensor is analyzed, simulated and tested. The results of test and analysis show that the speed sensor designed in this paper can detect the rotational speed. The inorganic electret speed sensor based on SiO_2/Si3N4/SiO_2 sandwich structure has the advantages of simple fabrication process, low cost, small size and high resolution. It provides a new idea for MEMS speed sensor and has a wide application prospect.
【学位授予单位】：北京交通大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TP212

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