基于压电叠堆的微动扫描平台控制器研制

发布时间：2018-02-13 01:31

本文关键词： 微动扫描器压电叠堆高压放大微位移控制 MSP430　出处：《大连理工大学》2016年硕士论文　论文类型：学位论文

【摘要】：近些年来,精密技术在科学研究、工业生产以及人们的生活中起到了越来越重要的作用,因此对精密定位控制技术的研究非常必要。本文所设计的控制器作为精密仪器的一部分,结合技术指标与时序控制要求,在分析了压电叠堆执行器以及微动扫描器的结构特性及其工作原理的基础上,对微动扫描器采用了一种差动驱动方法,设计了满足技术指标与时序控制要求的控制器开发方案,并按照参数指标要求实现了控制器硬件与软件的平台搭建。首先进行微动扫描平台控制器的硬件设计。由于仪器特定的尺寸限制,需将控制器的尺寸限制在91mmx 125mm的范围内,因此应以尺寸小、高集成度为设计原则。本文将控制器分为以MSP430F169单片机为主芯片的主控模块、以集成高压放大芯片PA79DK为核心的驱动信号放大模块和以电阻应变片作为传感器的位移反馈模块,并对各个模块进行硬件设计,最终实现了微动扫描平台控制器的搭建。然后根据时序控制要求进行了软件设计。通过嵌入式C语言编程使单片机能够产生方波与恒压驱动信号。在软件程序设计中采用了模块化的设计方法,将整体功能划分为时钟模块、内部DAC输出模块、外部DAC输出模块、ADC采样模块及控制算法模块,并对各个模块进行程序设计。同时进行了偏差处理PID控制算法的仿真,得到了合适的PID参数,实现了对微动扫描器输出位移的准确控制。最后对控制器进行了性能测试与优化。通过控制器联合测试,解决了硬件本身存在的问题。采用了在电路中串联电阻查看瞬时电流变化的方法进行电流测量,得到控制器正电源的实际输出功率为2.92W,并给出了DC-DC电源的优化建议。同时,测量了单通道峰值电流为25.2mA。通过程序的改进,使方波上升段毛刺电压降低76.2%。采用电涡流位移计测量微动扫描器输出位移,得到在PID控制算法下加入50g载荷量的控制误差为0.51μm。通过对控制器的需求指标参数的测试及优化,验证了所设计的微动扫描控制器的性能符合设计需求,同时说明控制方案的合理性。
[Abstract]:In recent years, precision technology has played an increasingly important role in scientific research, industrial production and people's lives. Therefore, it is very necessary to study the precise positioning control technology. As a part of precision instruments, the controller designed in this paper combines the technical specifications with the requirements of time series control. Based on the analysis of the structure and working principle of the piezoelectric stack actuator and the micro scanner, a differential drive method is adopted for the micro scanner, and a controller development scheme that meets the requirements of technical specifications and timing control is designed. The hardware and software of the controller are built according to the parameter requirements. Firstly, the hardware design of the controller is carried out. Because of the specific size limitation of the instrument, the controller size should be limited to the range of 91 mm x 125 mm. Therefore, the design principle should be small size and high integration. In this paper, the controller is divided into main control module with MSP430F169 microcontroller as the main chip. The driving signal amplification module based on integrated high voltage amplifier chip PA79DK and the displacement feedback module based on resistive strain gauge are designed, and the hardware of each module is designed. Finally, the controller of fretting scanning platform is built. Then the software is designed according to the requirement of time sequence control. The single-chip computer can generate square wave and constant voltage driving signal through embedded C language programming. The modular design method is used in the design. The whole function is divided into clock module, internal DAC output module, external DAC output module, ADCs sampling module and control algorithm module, and each module is programmed. At the same time, the deviation processing PID control algorithm is simulated. The appropriate PID parameters are obtained, and the accurate control of the output displacement of the fretting scanner is realized. Finally, the performance of the controller is tested and optimized. The method of checking the instantaneous current change in the series resistance in the circuit is used to measure the current. The actual output power of the positive power supply of the controller is 2.92 W, and the optimization suggestion of the DC-DC power supply is given. The single channel peak current of 25.2mA was measured. The burr voltage in the rising segment of square wave was reduced by 76.2mA.The output displacement of the fretting scanner was measured by eddy current displacement meter. The control error of adding 50g load under PID control algorithm is 0.51 渭 m. By testing and optimizing the parameters of the controller requirements, it is verified that the performance of the designed fretting scanning controller meets the design requirements. At the same time, the rationality of the control scheme is explained.
【学位授予单位】：大连理工大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TP273

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