纳米时栅传感结构及参数优化设计

发布时间：2018-02-16 00:21

本文关键词： 纳米测量时栅结构优化误差分析　出处：《重庆理工大学》2017年硕士论文　论文类型：学位论文

【摘要】：纳米位移测量技术随着高端装备制造行业的发展越来越受到关注,在集成电路制作、机械加工零部件制造以及国防军工等多个领域都有着重大需求。然而,大量程与高精度之间的矛盾始终制约着纳米位移测量技术的进一步发展。就发展最为成熟的纳米光栅技术来讲,其测量原理决定了它的栅线结构需要均匀性和一致性的制造,对大量程的加工来讲,难以保证。同时,光栅的测量和制造都面临着光学衍射极限瓶颈的制约,因而精度难以进一步提高。因此,作者所在实验室团通过长期对纳米测量技术的研究,提出通过“以时间测量空间”的研究思想,利用时间量构成空间测量基准,从而提高位移测量的精度。并在此研究思想的指导下,利用正交变换的电场构建运动参考系,研制出了一种新型的纳米时栅位移传感器。虽然,通过“栅面”的结构形式能够使得传感器达到纳米级的测量精度。但传感器结构参数与测量精度的关系并没有研究十分透彻,阻碍了传感器精度的进一步提高。本文主要围绕纳米时栅传感器的结构参数,进行了相关的分析和优化设计,主要包括:1.介绍了纳米时栅测量原理和结构形式,并完善了测量模型,将结构参数与输出信号整理为单一表达式。2.从结构设计的角度,以由“点”到“面”方式对测量结果中出现的误差进行了详细的理论推导,重点分析了动尺极片形状、定尺两边引线及整体的双列式结构对测量精度的影响。3.搭建实验平台,进行了大量的实验研究。验证了定尺两边引线会给测量结果带来一次谐波误差,双列式结构由于安装问题会在测量结果中引入二次谐波误差;在此基础上进行了结构的优化设计,提出了单列式纳米时栅结构,并通过实验证明的优化设计的有效性,能够进一步提高传感器的测量精度。最后,经过实验结果表明在200mm测量范围内,传感器精度可达±200nm。通过对纳米时栅传感器结构参数的研究,提高了纳米时栅传感器的测量精度,并进一步完善了纳米时栅测量理论体系,对今后的理论分析和实验研究都具有一定的指导意义。
[Abstract]:With the development of high-end equipment manufacturing industry, nano-displacement measurement technology has attracted more and more attention. It has great demand in many fields, such as integrated circuit manufacture, machined parts manufacturing and national defense military industry, etc. However, The contradiction between a large number of range and high precision has always restricted the further development of nano-displacement measurement technology. In terms of the most mature nano-grating technology, its measuring principle determines that its grating structure needs uniform and consistent manufacture. At the same time, the measurement and manufacture of grating are restricted by the bottleneck of optical diffraction limit, so the precision is difficult to improve further. Through a long-term study of nanometries, the authors put forward the idea of "measuring space by time", which is based on the use of time to construct spatial measurement datum. So as to improve the accuracy of displacement measurement. Under the guidance of this research idea, a new type of displacement sensor with nanoscale grating is developed by using the orthogonal electric field to construct the motion reference system. The measurement accuracy of the sensor can be achieved by the structure of the "grating surface", but the relationship between the structural parameters of the sensor and the measurement accuracy has not been thoroughly studied. This paper mainly focuses on the structural parameters of the nanoscale grating sensor, and carries out the related analysis and optimization design, including: 1. The principle and structure of the nanoscale grating measurement are introduced. The measurement model is perfected, and the structural parameters and output signal are arranged into a single expression. 2. From the point of view of structural design, the errors in the measurement results are deduced in detail by the way of "point" to "surface". The influence of the shape of the moving ruler pole, the two leads of the fixed scale and the whole double-row structure on the measurement accuracy is analyzed. 3. The experimental platform is built. A large number of experimental studies have been carried out. It is verified that the two leads on both sides of the fixed scale will bring the first harmonic error to the measurement results, and the second harmonic error will be introduced into the measurement results because of the installation problem of the double-column structure. On this basis, the optimization design of the structure is carried out, and the single-column nanogrid structure is proposed. The experimental results show that the effectiveness of the optimal design can further improve the measurement accuracy of the sensor. The experimental results show that the precision of the sensor can reach 卤200 nm in the range of 200mm. Through the study of the structural parameters of the nanogrid sensor, the measurement accuracy of the nanoscale time grating sensor is improved, and the theoretical system of the nanoscale time grating measurement is further improved. It has certain guiding significance for the theoretical analysis and experimental research in the future.
【学位授予单位】：重庆理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TP212

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