温度自补偿高灵敏度非本征光纤珐珀横向负载传感器

发布时间：2018-02-24 09:11

  本文关键词： 光纤传感器 光纤EFPI 镀钯金膜 横向负载 温度自补偿　出处：《光学精密工程》2017年06期 　论文类型：期刊论文

【摘要】：为了提高光纤EFPI传感器的灵敏度,提出了一种新型EFPI传感结构,并对其温度特性以及横向负载特性进行了研究。首先,介绍了采用端面镀钯金膜的光纤EFPI传感器的结构及其制作方法;接着,建立了镀钯金膜光纤EFPI的温度传感模型,并通过Solidworks、Hypermesh与有限元分析软件ANSYS联合仿真,对它在不同受压力下进行理论模拟,获得了腔长变化与压力之间的关系;最后,对传统的光纤EFPI与镀钯金膜光纤EFPI的温度和横向负载特性进行了对比试验。试验结果表明,镀钯金膜光纤EFPI的温度灵敏度为6.083pm/℃,具有温度自补偿特性;它对横向负载的检测灵敏度可达40.83m/g,相对于传统的光纤EFPI横向负载的灵敏度提高了2.10倍。实验结果与理论分析相符合,为实际制作具有温度自补偿的高灵敏度光纤EFPI传感器提供了理论与实验依据。
[Abstract]:In order to improve the sensitivity of optical fiber EFPI sensor, a novel EFPI sensor structure is proposed, and its temperature characteristics and transverse load characteristics are studied. The structure and fabrication method of the optical fiber EFPI sensor with palladium and gold film on the end surface are introduced, and the temperature sensing model of the optical fiber EFPI with palladium and gold film is established, and the simulation is carried out by means of Solidworks / HyperMesh and the finite element analysis software ANSYS. The relationship between cavity length and pressure is obtained by theoretical simulation under different pressures. Finally, the temperature and transverse load characteristics of traditional optical fiber EFPI and palladium plated gold film fiber EFPI are compared. The temperature sensitivity of palladium and gold coated fiber EFPI is 6.083pm / 鈩，

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