硅基底石墨烯器件的现状及发展趋势

发布时间：2018-02-27 02:31

本文关键词： 石墨烯场效应晶体管光电器件传感器　出处：《物理学报》2017年21期 　论文类型：期刊论文

【摘要】：石墨烯是一种由单层碳原子紧密排列而形成的具有蜂窝状结构的二维晶体材料,特殊的结构赋予了其优异的性能,如高载流子迁移率、电导率、热导率、力学强度以及量子反常霍尔效应.由于石墨烯优异的特性,迅速激起了人们对石墨烯研究以及应用的热情.石墨烯沉积或转移到硅片后,其器件构建与集成和传统硅基半导体工艺兼容.基于石墨烯的硅基器件与硅基器件的有机结合,可以大幅度提高半导体器件的综合性能.随着石墨烯制备工艺和转移技术的优化,硅基底石墨烯器件将呈现出潜在的、巨大的实际应用价值.随着器件尺寸的纳米化,器件的发热、能耗等问题成为硅基器件与集成发展面临的瓶颈问题,石墨烯的出现为解决这些问题提供了一种可能的解决方案.本文综述了石墨烯作为场效应晶体管研究的进展,为解决石墨烯带隙为零、影响器件开关比的问题,采用了量子限域法、化学掺杂法、外加电场调节法和引入应力法.在光电器件研究方面,石墨烯可以均匀吸收所有频率的光,其光电性能也受到了广泛的关注,如光电探测器、光电调制器、太阳能电池等.同时,石墨烯作为典型的二维材料,其优越的电学性能以及超高的比表面积,使其作为高灵敏度传感器的研究成为纳米科学研究的前沿和热点领域.
[Abstract]:Graphene is composed of a single layer of carbon atoms arranged closely and forming a honeycomb structure of two-dimensional crystal material, special structure gives its excellent performance, such as high carrier mobility, electrical conductivity, thermal conductivity, mechanical strength and the quantum anomalous Holzer effect. Because of the characteristics of graphene excellent, quickly aroused the people of the research and application of graphene. The graphene deposited enthusiasm or transferred to the silicon wafer, the device construction is compatible with integrated and conventional silicon-based semiconductor process. The organic combination of graphene in silicon and silicon based devices based on, can greatly improve the comprehensive performance of semiconductor devices. With the optimization of graphene preparation and transfer the silicon substrate graphene devices will show great potential and practical value. With the size of the device, nano devices, heating, energy consumption and other issues become silicon-based devices and set A bottleneck problem facing the development of graphene, provides a possible solution to solve these problems. This paper reviews the progress of graphene as field effect transistor research, in order to solve the graphene band gap is zero, effects of switching ratio, using the quantum confinement method, chemical doping method the electric field, adjustment method and the stress method. In the research of optoelectronic devices, graphene can be evenly absorbed all the frequencies of light, the photoelectric properties have also attracted considerable attention, such as photoelectric detector, photoelectric modulator, solar cell and so on. At the same time, as a typical two-dimensional graphene material, its excellent electrical properties and super high specific surface area, so as to study the high sensitivity sensor has become a research hotspot and frontier field of nano science.

【作者单位】：中国科学院纳米科学卓越创新中心国家纳米科学中心纳米系统与多级次制造重点实验室;中国科学院大学材料科学与光电技术学院;
【基金】：国家重点研发计划纳米科技重点专项(批准号:2016YFA0200403) 国家自然科学基金(批准号:51472057)资助的课题~~
【分类号】：TN15;TN386;TP212

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