基于构型优化的高阶模态微质量传感器灵敏度提升方法

发布时间：2018-03-02 19:06

本文选题：微质量传感器　切入点：高阶模态　出处：《光学精密工程》2017年03期 　论文类型：期刊论文

【摘要】：高灵敏度是微质量传感器准确探测细菌、病毒和气体等物质的关键指标。虽然借助微型化的高阶模态梁振动可以有效提升探测灵敏度,但微尺度效应也降低了传感器的抗环境干扰能力。因此,如何在特定尺度约束下提升高阶模态传感器的灵敏度已成为谐振式微传感器设计的前沿问题。本文在研究弹性梁几何构型、压电层尺寸与有效质量分布对振动模态影响关系的基础上,建立了压电驱动多阶梯梁式微质量传感器的灵敏度分析模型,以传感器灵敏度提升最大为目标,建立了高阶振动模态下悬臂梁几何构型优化设计模型,得到了在不同振动模态下具有最高灵敏度的悬臂梁构型,使同尺寸传感器的灵敏度提升了10.0~15.0倍。考虑驱动位置与制造成本约束,设计并研制了具有六阶梯梁结构的高阶模态微质量传感器。实验结果表明,总长度为17.6mm的六阶梯梁微质量传感器的灵敏度为18.8×10~4 Hz/g,考虑制造误差的影响,其二阶模态灵敏度为同尺寸等截面梁传感器的10.0倍,较一阶模态同尺寸传感器灵敏度提升了19.8倍,从而验证了所提出的高阶模态微质量传感器灵敏度提升方法的有效性和可行性。
[Abstract]:High sensitivity is a key indicator for the accurate detection of bacteria, viruses and gases by micro-mass sensors. However, the microscale effect also reduces the ability of the sensor to resist environmental interference. How to improve the sensitivity of high-order modal sensors under specific scale constraints has become a frontier problem in the design of resonant micro-sensors. This paper is studying the geometric configuration of elastic beams. Based on the effect of piezoelectric layer size and effective mass distribution on vibration mode, a sensitivity analysis model of piezoelectric multi-step beam micro-mass sensor is established. The optimal design model of cantilever beam geometry under higher vibration mode is established, and the cantilever beam configuration with the highest sensitivity under different vibration modes is obtained. The sensitivity of the sensor of the same size is increased by 10.0 ~ 15.0 times. Considering the constraints of driving position and manufacturing cost, a high-order modal micro-mass sensor with six-step beam structure is designed and developed. The experimental results show that, The sensitivity of the six-step beam micro-mass sensor with a total length of 17.6 mm is 18.8 脳 10 ~ (4) Hz / g. Considering the effect of manufacturing error, the second-order modal sensitivity is 10.0 times that of the same size and equal section beam sensor, which is 19.8 times higher than that of the first-order mode and the same size sensor. Thus, the effectiveness and feasibility of the proposed sensitivity enhancement method for high order modal micro mass sensors are verified.
【作者单位】：大连理工大学工业装备结构分析国家重点实验室汽车工程学院;
【基金】：国家自然科学基金资助项目(No.51575088,No.11372063,No.11332004,No.11572073) 大连理工大学星海优青资助项目
【分类号】：TP212

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