调平聚焦伺服控制系统的优化设计

发布时间：2018-03-07 16:56

本文选题：测量　切入点：光栅　出处：《光学学报》2017年01期 　论文类型：期刊论文

【摘要】：以提高共焦差动并行激光直写中光束刻写质量为目标,分析设计了调平聚焦伺服控制系统。采用柱面镜作为像散元件,与四象限光电探测器结合,利用差动像散检测方法和比例积分微分(PID)反馈算法减少光源和外部干扰的误差,获得高灵敏度、高精度、高稳定性的探测曲线。通过优化光学设计参数,本系统能获得具有高灵敏性与一致稳定性的探测曲线,探测范围为3μm,静态聚焦误差可达±5.0nm;动态聚焦压电陶瓷(PZT)伸长量可保证在焦深范围内,焦点位置辨别精度可达纳米量级,可探测调平台的倾斜角和俯仰角在0.01mrad左右。利用该系统可实现光栅的刻写,进一步为更大尺寸、更高密度的光栅刻写提供依据。
[Abstract]:Aiming at improving the quality of laser beam writing in confocal differential parallel direct writing, a leveling and focusing servo control system is designed and analyzed. The cylindrical mirror is used as astigmatic element and combined with a four-quadrant photodetector. The differential astigmatic detection method and the proportional integral differential differential (PID) feedback algorithm are used to reduce the errors of light source and external interference, and the detection curves with high sensitivity, high accuracy and high stability are obtained. The optical design parameters are optimized. The system can obtain the detection curve with high sensitivity and uniform stability. The detection range is 3 渭 m and the static focusing error can reach 卤5.0 nm. The dynamic focusing piezoelectric ceramic PZT elongation can be guaranteed to be of nanometer order of magnitude in the range of focal depth. The tilt angle and pitch angle of the detectable adjustable platform are about 0.01 Mrad. The grating writing can be realized by using this system, which provides the basis for the larger size and higher density grating writing.
【作者单位】：中国科学院上海光学精密机械研究所信息光学与光电技术实验室;中国科学院大学;
【基金】：国家科技部项目(2012YQ170004) 国家自然科学基金(61307064)
【分类号】：TP273

【参考文献】

相关硕士学位论文前1条

1 潘萍;差动像散离焦检测技术研究[D];哈尔滨工业大学;2010年

【共引文献】

相关硕士学位论文前1条

1 关云飞;基于FPGA的差动像散离焦信号的检测和处理技术[D];哈尔滨工程大学;2012年

【二级参考文献】