飞秒激光改性区选择性化学腐蚀加工光纤微纳结构传感器

发布时间：2018-03-20 20:46

本文选题：飞秒激光　切入点：化学腐蚀　出处：《科学通报》2016年06期 　论文类型：期刊论文

【摘要】：光纤微纳结构传感器具有体积小、质量轻、抗电磁干扰和灵敏度高等优点,已成为各领域不可或缺的传感器件.本文简要介绍了飞秒激光改性区选择性化学腐蚀加工光纤微纳结构的方法,并根据传感器工作原理,将所得传感器件分为干涉型、衍射型和复合型3种.重点阐述了各类型器件的结构和性能,并对运用该方法制作的光纤微纳结构进行总结和展望.
[Abstract]:Optical fiber sensor for micro nano structure has the advantages of small volume, light weight, anti electromagnetic interference and high sensitivity, has become indispensable in the areas of sensor. This paper briefly introduces the change of femtosecond laser selective chemical etching processing of fiber micro nano structure method, and according to the working principle of the sensor, the sensor is divided into interference. Diffraction type and composite type 3. Focusing on the structure and properties of various types of devices, and making use of the method of optical fiber micro nano structure are summarized and reviewed.

【作者单位】：中南大学高性能复杂制造国家重点实验室;
【基金】：国家自然科学基金(91123035,91323301,51475482,51335011,51475481) 国家重点基础研究发展计划(2011CB013000) 教育部“新世纪优秀人才支持计划”(NCET-12-0548)资助
【分类号】：TP212

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