金属氧化物气敏薄膜传感元器件研究

发布时间：2018-03-21 07:32

本文选题：薄膜元件　切入点：金属氧化物　出处：《山东大学》2017年硕士论文　论文类型：学位论文

【摘要】：随着当前工业农业、信息科学、环境检测等技术的日益提高,气敏元件应用范围极广。我们已经不满足于现有气敏元件的综合性能,需要通过改善工艺或研制新型材料提高其综合性能以适应当前社会发展的巨大需求。目前流行于国内外的TGS元件存在诸多不足,例如:气敏层材料单一、只能进行手工操作,无法实现自动化集成化生产、灵敏度和功耗相对过高。这极大的限制对气敏元件的探索,因此必须对现有气敏元件技术进行改造。本论文研究目的在于为研制出响应时间快、长期稳定性好、成品率高的新型成熟元件提供可行性方案。本文提出了薄膜气敏元件光刻工艺的可行方案,并对助剥膜Al剥离剂方案和助剥膜ZnO剥离剂方案进行说明。详细描述了溅射过程机理,发现了溅射过程的有效区。通过对溅射离子碰撞衬底结合能Eact的估算,解释了 PAr*的存在和有关概念。并对金属氧化物气敏元器件的性能测试与结果分析。目的是为新一代气敏元件提供使用参数,同时为其他功能元件的研制提供参考。气敏元件气敏特性曲线说明两项与元件性能相关内容及元件的选择性与最佳工作温度;气敏元件的厚度效应说明其灵敏度、响应时间与气敏层厚度存在最佳关系;气敏元件的气敏特性与所测气体浓度存有关系,及浓度越高气敏特性越明显;气敏元件的掺杂量存在一个最优值使得其灵敏度最高;气敏元件的灵敏度虽随湿度变化较大,但采用相对湿度时其变化较小;通过实验测出气敏元件的温耗特性曲线,证明其与元件尺寸有关。测试结果证明新型薄膜元件各种性能均优于目前的流行商品TGS元件,其未来发展具有很大潜力。
[Abstract]:With the increasing development of industry and agriculture, information science, environmental detection and other technologies, gas sensors are widely used. We are no longer satisfied with the comprehensive performance of existing gas sensors. It is necessary to improve its comprehensive performance by improving the process or developing new materials to meet the great needs of the current social development. At present, there are many shortcomings in TGS components at home and abroad. For example, the gas sensing layer material is single and can only be operated manually. It is impossible to realize automatic integrated production, and the sensitivity and power consumption are relatively high. This greatly limits the exploration of gas sensors, so it is necessary to reform the existing gas sensor technology. The purpose of this paper is to develop a fast response time for the development of gas sensors. In this paper, a feasible scheme for lithography of thin film gas sensing elements is presented, which has good long-term stability and high yield. The scheme of Al peeling agent and ZnO peeling agent are described. The sputtering mechanism is described in detail, and the effective region of sputtering process is found. The binding energy Eact of sputtering ion colliding substrate is estimated. The existence and related concepts of Par * are explained, and the performance test and result analysis of metal oxide gas sensing components are given. The purpose of this paper is to provide operational parameters for the new generation of gas sensors. At the same time, it provides a reference for the development of other functional components. The gas sensing characteristic curve of the gas sensor shows the content related to the performance of the element, the selectivity and the optimum working temperature of the element, the thickness effect of the gas sensor, and the sensitivity of the gas sensor. There is an optimum relationship between the response time and the thickness of the gas sensing layer, the gas sensitivity of the gas sensor is related to the measured gas concentration, and the higher the gas concentration is, the more obvious the gas sensitivity is, and the doping content of the gas sensor has an optimal value to make it the most sensitive. The sensitivity of the gas sensor varies greatly with the humidity, but the change is small when the relative humidity is used. The temperature consumption characteristic curve of the gas sensor is measured by experiments. It is proved that it is related to the size of the element. The test results show that the new type of thin film element has better performance than the current popular commercial TGS elements, and its future development has great potential.
【学位授予单位】：山东大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TP212

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