基于飞秒激光加工的微纳高温光纤振动传感器

发布时间：2018-03-22 14:40

  本文选题：振动传感器　切入点：高温传感器　出处：《光学技术》2017年04期 　论文类型：期刊论文

【摘要】：报道了一种基于飞秒激光加工的微纳高温振动传感器。通过熔接形成单模光纤-空芯光纤-单模光纤的结构,利用单模光纤和空芯光纤在熔接面形成的菲涅尔反射,构成外腔式法布里-珀罗干涉仪(EFPI)。用飞秒激光烧蚀空芯光纤,形成悬臂梁结构。末端的单模光纤作为质量块,在受到振动时带动悬臂梁振动,使悬臂梁产生微弯,进而使EFPI腔长发生变化。实验结果表明,传感器的工作区域为20~300Hz,在100Hz时,0~3.01g范围内测得加速度分辨率为5×10-4 g,加速度响应灵敏度为129.6nm/g。传感器受温度影响小,腔长的温度交叉响应仅为0.225nm/℃,传感器可耐950℃高温冲击。
[Abstract]:A micro / nano high temperature vibration sensor based on femtosecond laser processing is reported. The structure of single mode optical fiber, hollow fiber and single mode fiber is formed by welding. Fresnel reflection is formed by using single mode fiber and hollow fiber on the fusion surface. The structure of cantilever beam is formed by using femtosecond laser ablation of hollow fiber to form the cantilever beam structure. The single-mode optical fiber at the end of the beam acts as a mass block, driving the cantilever beam to vibrate when it is subjected to vibration, which makes the cantilever beam slightly bend. The experimental results show that the working area of the sensor is 20 脳 10 ~ (-3) Hz, the acceleration resolution is 5 脳 10 ~ (-4) g and the sensitivity of acceleration response is 129.6 nm / g. The sensor is less affected by temperature, and the acceleration resolution is 5 脳 10 ~ (-4) g. The temperature cross response of cavity length is only 0.225nm/ 鈩，

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