电子轰击有源像素传感器电荷收集效率理论模拟研究

发布时间：2018-05-08 07:28

本文选题：微光夜视技术 + 电子轰击有源像素传感器　；参考：《长春理工大学》2017年硕士论文

【摘要】：由于电子轰击有源像素传感器(EBAPS)具有高探测灵敏度、高机电一体化、低功耗、体积小和低成本CMOS加工工艺等优点,因此得到了国内外微光成像领域的特别关注。基于EBAPS的性能受其电子倍增层结构参数的影响,本文针对电子倍增层结构与电荷收集效率的关系进行了理论模拟研究。首先,依据低能电子与固体相互作用模型结合Monte Carlo方法,模拟分析了电子入射到样品中的电子散射特性;其次,模拟分析了电子入射到EBAPS倍增区域内倍增电子的分布情况,建立倍增区域内倍增电子的分布模型,得到倍增电子的轨迹分布。最后,建立了基底均匀掺杂和梯度掺杂情况下电子轰击有源像素传感器(EBAPS)的电荷收集效率(CCE)的计算模型,依据半导体基础理论分别研究了基底均匀掺杂情况下,不同掺杂浓度、膜厚以及入射电子能量对电荷收集效率的影响,电荷收集效率理论模拟结果与已报道的(4KeV,均匀掺杂)实测的结果较为符合;同时研究了梯度掺杂情况下,不同掺杂模型的电荷收集效率,最终得到较高的电荷收集效率为92%。本文模拟研究结果可以为高增益的EBAPS的制备提供理论依据。
[Abstract]:Due to the advantages of electronic bombardment active pixel sensor (EBAPS), such as high detection sensitivity, high electromechanical integration, low power consumption, small size and low cost, etc., it has attracted special attention in the field of low light level imaging at home and abroad. Based on the fact that the performance of EBAPS is affected by the structure parameters of the electron multiplication layer, the relationship between the structure of the electron multiplication layer and the charge collection efficiency is studied theoretically in this paper. Firstly, based on the model of the interaction between low energy electrons and solids and the Monte Carlo method, the scattering characteristics of electrons incident into the samples are simulated and analyzed. Secondly, the distribution of the electrons in the region of EBAPS multiplication is simulated and analyzed. The distribution model of the multiplying electrons in the multiplying region is established, and the trajectory distribution of the multiplicative electrons is obtained. Finally, the model of charge collection efficiency (CCEE) for EBAPS (active Pixel Sensor) is established under the condition of uniform substrate doping and gradient doping. According to the basic theory of semiconductors, the different doping concentrations are studied respectively under the condition of uniform substrate doping. The effect of film thickness and incident electron energy on charge collection efficiency is in good agreement with the reported results of uniform doping and the theoretical simulation results of charge collection efficiency are also studied in the case of gradient doping. The charge collection efficiency of different doping models is 92. The simulation results can provide theoretical basis for the preparation of high gain EBAPS.
【学位授予单位】：长春理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TP212

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