铝基微结构光栅几何参数反演

发布时间：2018-05-24 05:18

  本文选题：光栅结构反演 + 随机微粒群优化(SPSO)算法　； 参考：《北京航空航天大学学报》2017年11期

【摘要】：微结构光栅是一种广泛应用的电子元件。采用随机微粒群优化(SPSO)算法反演了一维铝基衬底矩形光栅的几何结构参数。首先介绍了严格耦合波分析(RCWA)法和微粒群优化算法的基本原理,并采用RCWA法求解了光栅内电磁场问题;然后根据正问题求得的光栅光谱反射率建立目标函数,并采用SPSO算法优化目标函数,反演得到单槽和双槽矩形光栅的周期、凸脊宽度和凹槽深度;最后分析了种群大小和搜索区间对反演结果的影响。结果表明,SPSO算法可以准确地反演光栅几何结构参数,并推荐种群数取30。
[Abstract]:Microstructural grating is a widely used electronic component. The geometric parameters of one-dimensional aluminum substrate rectangular grating are inversed by stochastic particle swarm optimization (SPSO) algorithm. The basic principles of strictly coupled wave analysis (RCWA) method and particle swarm optimization (PSO) algorithm are introduced, and the electromagnetic field problem in grating is solved by RCWA method, and then the objective function is established according to the spectral reflectivity of grating obtained from the positive problem. Using SPSO algorithm to optimize the objective function, the period, ridge width and groove depth of single and double grooved rectangular gratings are obtained. Finally, the effect of population size and search interval on the inversion results is analyzed. The results show that the SPSO algorithm can accurately retrieve the geometric structure parameters of the grating, and the population number is recommended to be 30.
【作者单位】： 哈尔滨工业大学能源科学与工程学院;上海卫星工程研究所;
【基金】：国家自然科学基金(51476043)~~
【分类号】：TP18;V444.3
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本文编号：1927823