一种集成微流道的薄膜体声波液体浓度传感器

发布时间：2018-06-29 20:05

  本文选题：MEMS + 薄膜体声波谐振器　； 参考：《纳米技术与精密工程》2017年06期

【摘要】：基于MEMS工艺制造的薄膜体声波谐振器(FBAR)是一种新型的质量传感器,在气相环境中具有极高的Q值,但在液相环境中,由于液体阻尼作用,FBAR的Q值大幅降低.本文提出了一种谐振器与微流道集成的解决方案,避免了谐振器和液体的大范围接触,有效提高了谐振器的Q值.通过设计新的加工流程,利用标准MEMS工艺实现了微流道和谐振器的集成.将该集成器件用于葡萄糖浓度的检测,结果表明其具有较小的检测极限和极高的线性度.由于充分利用了MEMS技术能进行大批量器件加工的特点,可极大地降低器件成本.集成微流道后,大大降低了样品的使用量,可实现对微升级别样品的检测,在微量检测中具有重要的应用前景.
[Abstract]:Thin film bulk acoustic resonator (FBAR) based on MEMS process is a new mass sensor with high Q value in gas phase environment, but in liquid phase environment, the Q value of FBAR decreases greatly due to liquid damping. In this paper, a solution for the integration of resonator and microchannel is proposed, which avoids the contact between the resonator and the liquid in a wide range and effectively increases the Q value of the resonator. The integration of microchannel and resonator is realized by designing a new machining process and using standard MEMS process. The integrated device is applied to the detection of glucose concentration. The results show that the detection limit is small and the linearity is very high. The cost of devices can be greatly reduced because of the full use of MEMS technology, which can be used for mass fabrication of devices. With the integration of microchannels, the amount of sample used is greatly reduced, and the detection of microupgrade samples can be realized, which has an important application prospect in micro detection.
【作者单位】： 精密测试技术及仪器国家重点实验室(天津大学);
【分类号】：TP212
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本文编号：2083227