压电陶瓷驱动微位移平台及控制系统研究

发布时间：2018-07-05 12:39

本文选题：精密定位 + 压电微位移平台　；参考：《昆明理工大学》2017年硕士论文

【摘要】：精密定位技术已成为高新技术领域的核心之一,在尖端工业生产(如微纳CPU的生产、MEMS微纳机电系统的加工制造等)和科学研究(如细胞注射、AFM原子力学显微镜精度的提高等)中占有极其重要的地位。因此,对精密定位技术的研究成为了全球科学家和学者关注的热点。而精密定位技术定位精确度的提高、准确度的增强、分辨力的提升以及定位速度的提高一直是该技术研究的难点。为此,本文以自行搭建的压电微位移平台精密定位系统作为研究对象,编写了相关的控制程序,对压电微位移平台迟滞特性进行了建模,通过基于电压补偿前馈控制及PID反馈控制的闭环控制方法对其迟滞进行了补偿,以达到线性控制的目的。主要的研究类容如下:1.针对XP-611型压电微位移平台,搭建了基于压电微位移平台的精密定位实验系统。实验系统由以下几个工作模块组成:位移传感模块、驱动电源模块、压电微动工作台、计算机机控制系统。2.针对以一体式压电微位移平台XP-611为核心的精密定位实验系统,采用基于LabVIEW的数据采集程序对微位移工作台的数据进行采集。采用基于MATLAB的测试程序对微位移平台的特性进行测试。3.对压电微位移平台的迟滞特性进行了研究,阐明了其迟滞非线性机理,并利用Bouc-Wen模型对其迟滞特性进行数学描述。通过分析该模型的优缺点,发现该模型在压电微位移平台快速定位中存在建模不准确的现象,提出了以Bouc-Wen模型为核心结合压电微位移平台固有特性的复合建模方式。建立的复合模型在平台快速定位实验中,能够提升模型的准确率,验证了该复合模型的优越性,同时还建立了基于Bouc-Wen迟滞模型机理的类Bouc-Wen迟滞模型,以应用于有时效性要求的压电微位移平台的快速定位中。4.根据建立的迟滞模型,编写了相应的控制算法,以消除压电微位移平台的迟滞特性,达到线性控制的目的,具体为:分析了 Bouc-Wen模型的特点,编写了以电压补偿为前馈环节,PID控制反馈环节的闭环控制程序,将压电微位移台的迟滞电压进行补偿,以达到线性输出的目的,并和单一使用PID控制的方法以及单一使用Bouc-Wen模型电压补偿控制的方法进行了对比,验证了复合控制的优越性。
[Abstract]:Precision positioning technology has become one of the core fields of high and new technology. It plays a very important role in the advanced industrial production (such as the fabrication of MEMS MEMS micromechanical systems) and scientific research (such as the improvement of the precision of AFM atomic mechanical microscope). Therefore, the research of precision positioning technology has become the focus of attention of scientists and scholars all over the world. The improvement of positioning precision, accuracy, resolution and positioning speed are the difficulties in the research of precision positioning technology. Therefore, in this paper, the precision positioning system of piezoelectric micro-displacement platform is taken as the research object, and a related control program is compiled to model the hysteresis characteristics of the piezoelectric micro-displacement platform. The hysteresis is compensated by the closed-loop control method based on voltage compensation feedforward control and pid feedback control to achieve the purpose of linear control. The main categories of research are as follows: 1. Aiming at the XP-611 piezoelectric micro displacement platform, a precision positioning experiment system based on the piezoelectric micro displacement platform is built. The experimental system consists of the following working modules: displacement sensing module, driving power module, piezoelectric micromotion table, computer control system. Aiming at the precision positioning experiment system based on the integrated piezoelectric micro-displacement platform XP-611, the data acquisition program based on LabVIEW is used to collect the data of the micro-displacement table. The testing program based on MATLAB is used to test the characteristics of micro displacement platform. 3. 3. The hysteresis characteristics of piezoelectric micro-displacement platform are studied, the nonlinear hysteresis mechanism is explained, and the hysteresis characteristics of piezoelectric micro-displacement platform are described by using Bouc-Wen model. By analyzing the advantages and disadvantages of the model, it is found that the model is not accurate in the rapid positioning of piezoelectric micro-displacement platform. A composite modeling method based on Bouc-Wen model and inherent characteristics of piezoelectric micro-displacement platform is proposed. The composite model can improve the accuracy of the model in the platform rapid positioning experiment, and verify the superiority of the composite model. At the same time, the Bouc-Wen hysteresis model based on Bouc-Wen hysteresis model mechanism is established. In order to apply to the rapid positioning of piezoelectric micro-displacement platform with time-dependent requirements. 4. According to the established hysteresis model, the corresponding control algorithm is compiled to eliminate the hysteresis characteristics of the piezoelectric micro-displacement platform and to achieve the purpose of linear control. The characteristics of Bouc-Wen model are analyzed. A closed-loop control program with voltage compensation as feedforward link and pid control feedback link is written to compensate the hysteresis voltage of piezoelectric microdisplacement table in order to achieve the purpose of linear output. Compared with the single pid control method and the single Bouc-Wen model voltage compensation control method, the superiority of the compound control is verified.
【学位授予单位】：昆明理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TP273

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