双片集成数字硅陀螺接口ASIC的设计与测试
发布时间：2018-07-27 17:19
【摘要】：为实现MEMS陀螺高精度、数字化和小型化,适应惯性导航和测量等领域的应用要求,采用双片集成方式,基于0.5 um的N阱CMOS工艺,设计并实现了一款实用化的MEMS陀螺接口电路.设计了基于高频载波的闭环自激驱动电路和低噪声差分敏感检测模拟前级电路,高频信号将敏感信号调制到高频后与闪烁噪声相加,经过开关相敏解调以及低通滤波后得到低噪声模拟角速度输出,并由集成的高分辨率四阶单环一位sigma delta ADC将模拟信号转化成为数字信号,实现数字化输出的硅陀螺接口电路.测试结果表明:sigma delta调制器的动态范围达到130 d B,陀螺整机量程为±200°/s,带宽为60 Hz,刻度因子为46.45 LSB/((°)·s~(-1));线性度为342×10~(-6),输出噪声为0.004(°)·s~(-1)/Hz1/2,零偏稳定性为3.4°/h.通过电路集成实现了小型化、低成本和角速度数字化精确输出,测试结果与其他相关研究对比表明该结构可以得到很好的性能.
[Abstract]:In order to achieve high precision, digitalization and miniaturization of MEMS gyroscope, and to meet the requirements of inertial navigation and measurement, a practical interface circuit of MEMS gyroscope is designed and implemented based on 0.5um N-well CMOS technology. The closed-loop self-excited drive circuit based on high-frequency carrier and the analog analogue circuit of low-noise differential sensitive detection are designed. The high-frequency signal modulates the sensitive signal to high frequency and adds the scintillation noise. The output of low noise analog angular velocity is obtained by switching phase sensitive demodulation and low pass filtering. The analog signal is converted into digital signal by integrated high resolution four order single ring sigma delta ADC, and the interface circuit of silicon gyroscope with digital output is realized. The results show that the dynamic range of the delta modulator is 130dB, the measuring range of gyroscope is 卤200 掳/ s, the bandwidth is 60 Hz, the calibration factor is 46.45 LSB/ (掳) s ~ (-1); linearity is 342 脳 10 ~ (-6), the output noise is 0.004 (掳) s ~ (-1) / Hz / 2, and the bias stability is 3.4 掳/ h). The miniaturization, low cost and angular speed digital and accurate output are realized by circuit integration. The test results show that the structure can achieve good performance compared with other related studies.
【作者单位】： 哈尔滨工业大学MEMS中心;微系统与微结构教育部重点实验室(哈尔滨工业大学);
【基金】：上海航天科技创新基金(SAST2015052)
【分类号】：TP212
本文编号：2148577
[Abstract]:In order to achieve high precision, digitalization and miniaturization of MEMS gyroscope, and to meet the requirements of inertial navigation and measurement, a practical interface circuit of MEMS gyroscope is designed and implemented based on 0.5um N-well CMOS technology. The closed-loop self-excited drive circuit based on high-frequency carrier and the analog analogue circuit of low-noise differential sensitive detection are designed. The high-frequency signal modulates the sensitive signal to high frequency and adds the scintillation noise. The output of low noise analog angular velocity is obtained by switching phase sensitive demodulation and low pass filtering. The analog signal is converted into digital signal by integrated high resolution four order single ring sigma delta ADC, and the interface circuit of silicon gyroscope with digital output is realized. The results show that the dynamic range of the delta modulator is 130dB, the measuring range of gyroscope is 卤200 掳/ s, the bandwidth is 60 Hz, the calibration factor is 46.45 LSB/ (掳) s ~ (-1); linearity is 342 脳 10 ~ (-6), the output noise is 0.004 (掳) s ~ (-1) / Hz / 2, and the bias stability is 3.4 掳/ h). The miniaturization, low cost and angular speed digital and accurate output are realized by circuit integration. The test results show that the structure can achieve good performance compared with other related studies.
【作者单位】： 哈尔滨工业大学MEMS中心;微系统与微结构教育部重点实验室(哈尔滨工业大学);
【基金】：上海航天科技创新基金(SAST2015052)
【分类号】：TP212
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