气体放电过程关键参数测控技术研究
发布时间：2018-07-29 06:33
【摘要】：等离子体在放电过程中会受到不同因素的影响,比如电源的频率、放电气体种类、电极间距等。以往的控制方式多为手动操作,依旧操作者的经验、对实验情况的掌握程度、对实验操作的熟练程度来决定实验结果,实验的结果会因为操作者的不同而存在差异。本论文在这样的基础上设计了自由燃烧电弧电极间距控制系统和大气压射频等离子体功率控制系统,主要的研究工作包括:1)根据电路的工作原理,选择了恰当的整流、滤波和稳压电路,并且根据实际需要,选择了电路中各个元器部件,设计了供电电路。并且,根据控制需求和控制原理,通过对比不同的控制方式,选择适合的PID参数,编写控制程序。2)根据实验所需要达到的真空度要求,重新设计和改造了真空腔体。并且设计了电极间距控制系统,制作电路板和控制盒,来保证在实际操作过程中的安全性。最后通过实验,研究了在相同电流的工况下,改变电极间距对等离子体电弧的影响,同时进行研究的还有,在电极间距保持不变的情况下,改变电流对于等离子体电弧的影响,通过实验来验证控制效果。3)针对实验室中需要处理的对象,重新设计了大气压射频等离子体发生器的结构,并且根据进气量的需求优化了发生器的进气结构,让进气更加均匀。设计了光强度的反馈系统来控制控制放电电源。最后通过实验,研究了在相同的进气量条件下,功率的变化对于光强度变化的影响;同样进行的还有在保证功率不变的情况下,改变进气量对于放电光强度的影响。
[Abstract]:The plasma is affected by different factors, such as the frequency of power supply, the type of discharge gas, the distance between electrodes and so on. In the past, most of the control methods are manual operation, but the experience of the operator is still the same. The degree of mastery of the experimental situation and the proficiency of the experimental operation determine the results of the experiment, and the results of the experiment will be different because of the difference of the operator. In this paper, a free combustion arc electrode spacing control system and an atmospheric pressure RF plasma power control system are designed. The main research work includes: 1) according to the working principle of the circuit, the appropriate rectifier is selected. Filter and voltage stabilizer circuit, and according to the actual needs, selected the various components of the circuit, designed the power supply circuit. According to the control requirements and control principles, by comparing different control methods, selecting suitable PID parameters, writing control program .2) according to the vacuum degree requirements of the experiment, the vacuum cavity is redesigned and modified. The control system of electrode spacing is designed, and the circuit board and control box are made to ensure the safety in practical operation. Finally, the influence of changing the electrode spacing on the plasma arc is studied under the same current condition, and the influence of changing the current on the plasma arc is also studied when the electrode spacing remains constant. The structure of the atmospheric pressure RF plasma generator is redesigned and the intake structure is optimized according to the demand of the air intake to make the air intake more uniform. A light intensity feedback system is designed to control the discharge power supply. Finally, the influence of the power change on the light intensity is studied under the condition of the same air intake, and the influence of the change of the air intake on the discharge light intensity is also studied under the condition of keeping the same power.
【学位授予单位】：华北理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TP273;O53
本文编号：2151831
[Abstract]:The plasma is affected by different factors, such as the frequency of power supply, the type of discharge gas, the distance between electrodes and so on. In the past, most of the control methods are manual operation, but the experience of the operator is still the same. The degree of mastery of the experimental situation and the proficiency of the experimental operation determine the results of the experiment, and the results of the experiment will be different because of the difference of the operator. In this paper, a free combustion arc electrode spacing control system and an atmospheric pressure RF plasma power control system are designed. The main research work includes: 1) according to the working principle of the circuit, the appropriate rectifier is selected. Filter and voltage stabilizer circuit, and according to the actual needs, selected the various components of the circuit, designed the power supply circuit. According to the control requirements and control principles, by comparing different control methods, selecting suitable PID parameters, writing control program .2) according to the vacuum degree requirements of the experiment, the vacuum cavity is redesigned and modified. The control system of electrode spacing is designed, and the circuit board and control box are made to ensure the safety in practical operation. Finally, the influence of changing the electrode spacing on the plasma arc is studied under the same current condition, and the influence of changing the current on the plasma arc is also studied when the electrode spacing remains constant. The structure of the atmospheric pressure RF plasma generator is redesigned and the intake structure is optimized according to the demand of the air intake to make the air intake more uniform. A light intensity feedback system is designed to control the discharge power supply. Finally, the influence of the power change on the light intensity is studied under the condition of the same air intake, and the influence of the change of the air intake on the discharge light intensity is also studied under the condition of keeping the same power.
【学位授予单位】：华北理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TP273;O53
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