基于多读数头位移传感器误差自修正的研究

发布时间：2018-08-05 12:34

【摘要】：目前栅式位移传感器主要有光栅、容栅、球栅、感应同步器、旋转变压器、时栅等,提高其精度一般通过增加栅线密度和读数头数量来实现,或者依靠高精度母仪来检测和修正误差,但是这种方式对传感器的加工和安装要求高,或者传感器精度长时间保持性差。本文针对上述问题,提出了基于等差相位构建正交信号、实现多读数头测量、误差特征参数自辨识和误差自修正的新方法,该方法不增加加工和安装难度,定子和转子的槽数接近,多读数头有机集成在同一个定子,使读数头的一致性好。实验结果表明:基于等差相位构建多读数头误差成分少,通过多读数头误差特征参数自辨识和误差自修正后,传感器的误差可达到±1.9″。
[Abstract]:At present, there are mainly grating, capacitive grating, ball grating, inductive synchronizer, rotary transformer, time grating and so on. Generally, the accuracy of grating displacement sensors can be improved by increasing the density of grid lines and the number of readout heads. Or it depends on high precision master to detect and correct the error, but this way requires high processing and installation of the sensor, or the accuracy of the sensor is poor for a long time. In order to solve the above problems, this paper presents a new method of constructing orthogonal signals based on the isometric phase to realize the measurement of multiple readout heads, self-identification of error characteristic parameters and self-correction of errors. This method does not increase the difficulty of machining and installation. The number of slots of the stator and rotor is close, and the multi-head is integrated in the same stator, so that the uniformity of the reading head is good. The experimental results show that the error components of multi-head based on isometric phase are less, and the error of sensor can reach 卤1.9 "after self-identification and self-correction of error characteristic parameter of multi-head error.
【作者单位】：重庆理工大学;时栅传感及先进检测技术重庆重点实验室;
【基金】：国家自然科学基金(51275551) 重庆理工大学研究生创新基金(YCX2016216)
【分类号】：TP212

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