MEMS高温温度传感器的研制与测量精度研究
发布时间：2018-09-01 19:26
【摘要】：航空发动机智能化及其他机械系统的智能化需要原位集成制造的传感器,为此研制了发动机涡轮叶片原位集成高温传感器。该高温传感器采用MEMS微制造工艺将厚度在微米量级的微小传感器原位集成在航空发动机涡轮叶片表面,利用微技术制造的传感器和标准的热电偶进行了一系列的高温测量试验和一系列细致的高温温度表征测量研究。该微制造工艺攻克了两项技术难关:曲表面的光刻技术和高温绝缘层的制作技术。涡轮叶片表面原位集成的微传感器不仅可以原位测量高达800℃的环境温度,并且具有很高的机械强度,可以承受高达40 g的振动和100 g的冲力。研究还表明,在高温测量环境下,高温测量精度和高温环境下的温度场(高温温度的空间分布与升温时间迟豫)密切相关。由于高温环境温度场的差异,可以产生高达10%的测量本征误差。
[Abstract]:Intelligent aero-engine and other mechanical systems require in-situ integrated manufacturing sensors. Therefore, an in-situ integrated high-temperature sensor for engine turbine blades is developed. The high temperature sensor uses MEMS microfabrication process to integrate micro sensors with thickness of micron in situ on the surface of aero-engine turbine blade. A series of high temperature measurement experiments and a series of meticulous high temperature characterization measurements have been carried out by using the sensors and standard thermocouples fabricated by microtechnology. The micro-fabrication process has overcome two technical difficulties: lithography of curved surface and fabrication of high-temperature insulating layer. The in-situ integrated micro sensor not only can measure the ambient temperature up to 800 鈩，
本文编号：2218121
[Abstract]:Intelligent aero-engine and other mechanical systems require in-situ integrated manufacturing sensors. Therefore, an in-situ integrated high-temperature sensor for engine turbine blades is developed. The high temperature sensor uses MEMS microfabrication process to integrate micro sensors with thickness of micron in situ on the surface of aero-engine turbine blade. A series of high temperature measurement experiments and a series of meticulous high temperature characterization measurements have been carried out by using the sensors and standard thermocouples fabricated by microtechnology. The micro-fabrication process has overcome two technical difficulties: lithography of curved surface and fabrication of high-temperature insulating layer. The in-situ integrated micro sensor not only can measure the ambient temperature up to 800 鈩，
本文编号：2218121
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