基于电容阵列的柔性触觉传感器的研究
发布时间：2018-09-05 09:51
【摘要】：柔性电子器件具有可伸缩、弯曲、折叠的特性能够完美的适应真实世界实物表面复杂3D结构及其结构实时变化的传感要求,正受到人们越来越多的关注,在消费电子、智能机器人、生物医疗等领域,柔性电子器件也有着极为可观的应用前景。本文主要研究了双层平行板型结构(Parallel Plate Structure,简称PPS)和圆渐开线型结构(Circular Involute Structure,简称CIS)两种结构的电容式柔性触觉传感器,包括结构设计到工艺制备以及性能测试,最后探究了器件在机械手指上的应用试验。具体的研究内容和成果如下:1、设计出了两种不同结构的电容阵列柔性触觉传感器。使用弹性模量较低的聚二甲基硅氧烷(Polydimethylsiloxane,简称PDMS)作为其结构的主要材料以及金属Cu为电极材料。采用弯曲蛇形线连接各金属电极板,提高了器柔韧性和延展性。金属层与PDMS层之间增加聚酰亚胺(Polyimide,简称PI)基座,增强了器件抗机械拉伸度,保障了器件结构及其电学性能的稳定。此外,将PPS结构电容器的介质层由条形柱状阵列构成,提高了介质形变能力,改善了电容传感器的灵敏度。2、探索出了一套成熟的电容式柔性触觉传感器的制备工艺,同时测试器件灵敏度及其温度稳定性。在超净间实验室条件下,借助微纳加工仪器制备出PPS和CIS两种结构的电容式触觉传感器。性能测试主要包括灵敏度测试以及温度稳定性,在1kHz～1 MHz频率下PPS电容传感器灵敏度约为:4.10%/N。在1kHz～1MHz频率下CIS电容传感器灵敏度为:0～3N作用了范围内约为6.10%/N;在3N以上力作用时,灵敏度不断减小至几乎为零。在1MHz测试频率下,PPS传感器灵敏度的温度系数几乎为零,CIS传感器灵敏度的温度系数为-1.07 Pf/N℃3、探究了器件在机械手指上的应用试验。基于PPS电容采用简化工艺制备相应尺寸的器件。设计并制作外围集成电路,用于稳定精确的采集数据。试验通过抓取苹果操作来判断其真假,体现了器件在仿生人造皮肤触觉系统的应用前景。
[Abstract]:Flexible electronic devices with the characteristics of scalability, bending, folding can perfectly adapt to the real world physical surface complex 3D structure and the structure of real-time changes in the sensing requirements, is getting more and more attention, in consumer electronics, Flexible electronic devices also have a promising future in the fields of intelligent robots, biomedicine and so on. In this paper, the capacitive flexible tactile sensors with double layer parallel plate structure (Parallel Plate Structure, (PPS) and circular involute structure (Circular Involute Structure, (CIS) are studied, including structure design, process fabrication and performance test. Finally, the application test of the device on the mechanical finger is explored. The specific research contents and results are as follows: 1. Two kinds of capacitive array flexible tactile sensors with different structures are designed. Poly (dimethylsiloxane) (PDMS) with low elastic modulus was used as the main material of its structure and metal Cu as electrode material. The flexible and ductility of the device is improved by using the curved snake-shaped wire to connect each metal electrode plate. A polyimide (PI) base is added between the metal layer and the PDMS layer, which enhances the mechanical tensile resistance of the device and ensures the stability of the device structure and electrical properties. In addition, the dielectric layer of the PPS structure capacitor is composed of a strip cylindrical array, which improves the dielectric deformation ability, improves the sensitivity of the capacitive sensor, and explores the fabrication process of a mature capacitive flexible tactile sensor. The sensitivity and temperature stability of the device were also tested. Capacitive tactile sensors with PPS and CIS structures were fabricated by means of micro and nano processing instruments under the condition of super clean room laboratory. The performance tests mainly include sensitivity test and temperature stability. The sensitivity of PPS capacitive sensor is about: 4.10 / N at 1kHz~1 MHz frequency. At 1kHz~1MHz frequency, the sensitivity of CIS capacitive sensor is about 6.10 / N in the range of: 0 ~ 3N, and decreases to almost zero when the force is above 3N. The temperature coefficient of the sensitivity of the 1MHz sensor is almost zero. The temperature coefficient of the sensor is -1.07 Pf/N 鈩，
本文编号：2223922
[Abstract]:Flexible electronic devices with the characteristics of scalability, bending, folding can perfectly adapt to the real world physical surface complex 3D structure and the structure of real-time changes in the sensing requirements, is getting more and more attention, in consumer electronics, Flexible electronic devices also have a promising future in the fields of intelligent robots, biomedicine and so on. In this paper, the capacitive flexible tactile sensors with double layer parallel plate structure (Parallel Plate Structure, (PPS) and circular involute structure (Circular Involute Structure, (CIS) are studied, including structure design, process fabrication and performance test. Finally, the application test of the device on the mechanical finger is explored. The specific research contents and results are as follows: 1. Two kinds of capacitive array flexible tactile sensors with different structures are designed. Poly (dimethylsiloxane) (PDMS) with low elastic modulus was used as the main material of its structure and metal Cu as electrode material. The flexible and ductility of the device is improved by using the curved snake-shaped wire to connect each metal electrode plate. A polyimide (PI) base is added between the metal layer and the PDMS layer, which enhances the mechanical tensile resistance of the device and ensures the stability of the device structure and electrical properties. In addition, the dielectric layer of the PPS structure capacitor is composed of a strip cylindrical array, which improves the dielectric deformation ability, improves the sensitivity of the capacitive sensor, and explores the fabrication process of a mature capacitive flexible tactile sensor. The sensitivity and temperature stability of the device were also tested. Capacitive tactile sensors with PPS and CIS structures were fabricated by means of micro and nano processing instruments under the condition of super clean room laboratory. The performance tests mainly include sensitivity test and temperature stability. The sensitivity of PPS capacitive sensor is about: 4.10 / N at 1kHz~1 MHz frequency. At 1kHz~1MHz frequency, the sensitivity of CIS capacitive sensor is about 6.10 / N in the range of: 0 ~ 3N, and decreases to almost zero when the force is above 3N. The temperature coefficient of the sensitivity of the 1MHz sensor is almost zero. The temperature coefficient of the sensor is -1.07 Pf/N 鈩，
本文编号：2223922
本文链接：https://www.wllwen.com/kejilunwen/zidonghuakongzhilunwen/2223922.html
