微纳结构对电容式柔性压力传感器性能影响的研究
发布时间：2018-10-05 13:06
【摘要】：设计制备出三明治结构的电容式柔性压力传感器,并对其性能进行研究。该传感器以银纳米线为电极材料,聚二甲基硅氧烷(PDMS)为柔性衬底,同时采用毛面玻璃和光面玻璃分别作为柔性衬底的制备模板,制备出微纳结构和平面结构的PDMS薄膜。然后采用喷涂法制备Ag NWs/PDMS复合电极,以另外一层PDMS为介电层,将两电极面对面封装,得到电容式柔性压力传感器,最后系统研究了传感器的电极微纳结构对器件性能的影响。本文研究表明,具有微纳结构的AgNWs/PDMS复合薄膜传感器的灵敏度为1.0 k Pa~(-1),而平面结构的Ag NWs/PDMS复合薄膜传感器的灵敏度为0.6 k Pa~(-1),由此可知具有微纳结构的柔性衬底能够显著提高器件的灵敏度。
[Abstract]:The capacitive flexible pressure sensor with sandwich structure was designed and its performance was studied. Using silver nanowires as electrode material, poly (dimethylsiloxane) (PDMS) as flexible substrate, wool glass and smooth glass as template for preparation of flexible substrate, PDMS thin films with micro-nano structure and planar structure were prepared. Then the Ag NWs/PDMS composite electrode was prepared by spraying method and the other layer of PDMS was used as the dielectric layer to package the two electrodes face to obtain the capacitive flexible pressure sensor. Finally the effect of the electrode micro-nano structure of the sensor on the performance of the device was systematically studied. The present study shows that, The sensitivity of AgNWs/PDMS composite thin film sensor with micro-nano structure is 1.0 k Pa~ (-1), while that of planar Ag NWs/PDMS composite film sensor is 0.6 k Pa~ (-1).
【作者单位】： 电子科技大学光电信息学院;
【基金】：国家自然科学基金(61474016,61101030,61371046,61421002)
【分类号】：TP212
[Abstract]:The capacitive flexible pressure sensor with sandwich structure was designed and its performance was studied. Using silver nanowires as electrode material, poly (dimethylsiloxane) (PDMS) as flexible substrate, wool glass and smooth glass as template for preparation of flexible substrate, PDMS thin films with micro-nano structure and planar structure were prepared. Then the Ag NWs/PDMS composite electrode was prepared by spraying method and the other layer of PDMS was used as the dielectric layer to package the two electrodes face to obtain the capacitive flexible pressure sensor. Finally the effect of the electrode micro-nano structure of the sensor on the performance of the device was systematically studied. The present study shows that, The sensitivity of AgNWs/PDMS composite thin film sensor with micro-nano structure is 1.0 k Pa~ (-1), while that of planar Ag NWs/PDMS composite film sensor is 0.6 k Pa~ (-1).
【作者单位】： 电子科技大学光电信息学院;
【基金】：国家自然科学基金(61474016,61101030,61371046,61421002)
【分类号】：TP212
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