全聚合物非对称MZI光波导折射率传感器的研究

发布时间：2018-10-11 08:41

【摘要】：光通信技术飞速发展,现代社会对通信速度和容量的需求与日俱增。传统的电学信号的处理速度和通信带宽有局限性。光子集成电路(Photonic Integrated Circuit,PIC)将有源光器件、无源光器件和电子元件集成在一个芯片上,实现信号的开关、放大和传感等功能。同时电子器件之间通过光波导高速率通信,相较于电路的传输具有信息容量大、通信速率快等特点,提升了电路整体性能。PIC是未来光通信系统和集成电路系统互联的技术方向。光波导传感器是光子集成电路的重要光学原件,有灵敏度高、结构简单、响应速度快、不受电磁信号影响等优势。现阶段光波导传感器大多数是基于无机物衬底上的。有机聚合物材料具有成本低廉的优势,而基于有机衬底的传统光波导传感器灵敏度不高。本论文主要研究MZI(Mach-Zehnder Interferometer)波导的器件结构,设计优化并制备灵敏度高、工艺简单、成本低廉的全聚合物光波导传感器。全聚合物光波导传感器的芯层波导通过三个表面接触待测液体,相对于一个表面接触待测液体的矩形和倒脊型结构灵敏度分别提升5.50,5.24倍。基于此结构的非对称MZI传感器结构在Y分支的直波导部分设计曲线结构,引入长度差提高灵敏度。经过理论优化,两分支长度差为19.8μm时,在折射率为1.470-1.545区间时,传感灵敏度达到最大。然后基于光刻和湿法刻蚀工艺制作了这种器件,并使用PMMA薄膜优化了封装工艺。用不同折射率的苯甲醛和乙醇互溶液对器件输出功率进行测试,得到实际灵敏度为791.0d B/RIU,传感器分辨率为1.26×10-6RIU。最后,在理论上优化了对称型MZI和非对称型MZI两种聚合物传感器结构,将理论传感灵敏度提高到了1200d B/RIU以上。
[Abstract]:With the rapid development of optical communication technology, the demand for communication speed and capacity is increasing in modern society. The processing speed and communication bandwidth of traditional electrical signals are limited. Photonic integrated circuit (Photonic Integrated Circuit,PIC) integrates active optical devices, passive optical devices and electronic components on a single chip to realize the functions of signal switching, amplifying and sensing. At the same time, electronic devices communicate with each other through optical waveguides at high speed, which improves the overall performance of the circuit because of its large information capacity and high communication rate. PIC is the technical direction of interconnection between optical communication system and integrated circuit system in the future. Optical waveguide sensor is an important optical component of photonic integrated circuits, which has the advantages of high sensitivity, simple structure, fast response speed and no influence of electromagnetic signals. At present, most optical waveguide sensors are based on inorganic substrate. Organic polymer materials have the advantage of low cost, but the sensitivity of traditional optical waveguide sensors based on organic substrates is not high. In this paper, the device structure of MZI (Mach-Zehnder Interferometer) waveguide is studied, and the all-polymer optical waveguide sensor with high sensitivity, simple process and low cost is designed and fabricated. The core waveguide of the full polymer optical waveguide sensor contacts with the liquid to be measured through three surfaces, and the sensitivity of the rectangular structure and the inverted ridge structure of the whole polymer optical waveguide sensor is 5.50 ~ 5.24 times higher than that of one surface contact liquid. The asymmetric MZI sensor structure based on this structure is used to design the curve structure in the straight waveguide of Y branch, and the length difference is introduced to improve the sensitivity. After theoretical optimization, when the length difference between the two branches is 19.8 渭 m and the refractive index is 1.470-1.545, the sensing sensitivity reaches the maximum. Then the device is fabricated based on photolithography and wet etching, and the packaging process is optimized by using PMMA thin film. The output power of the device was measured with benzaldehyde and ethanol solution with different refractive index. The practical sensitivity was 791.0 dB / RIU.The sensor resolution was 1.26 脳 10 ~ (-6) RIU. Finally, two kinds of polymer sensor structures, symmetric MZI and asymmetric MZI, are optimized theoretically, and the theoretical sensing sensitivity is increased to more than 1200 d B/RIU.
【学位授予单位】：吉林大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TP212

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