纳米时栅误差分析与实验研究

发布时间：2019-03-29 20:24

【摘要】：纳米时栅传感器是由我国自主研发以“时间量测量空间量”的新型纳米级位移测量仪器,其特点是:大量程,高精度。根据时栅测量原理,传感器的安装偏差、结构实现、基体加工和工作环境变化等均会导致测量误差。这制约了纳米时栅传感器精度的进一步提高。目前,本人所在团队在针对纳米时栅传感器的基础研究中也缺乏此问题的分析总结。为研究误差的产生原因及对测量精度的影响规律,发展纳米时栅传感器的理论体系,提高纳米时栅传感器的测量精度,优化目前纳米时栅传感器的数据分析实验系统性能,提升团队实验效率。本文在纳米时栅传感器的测量模型基础上,通过数学和物理学的手段,对纳米时栅传感器在工作过程所产生的误差进行研究,做了如下工作:1.根据纳米时栅行波表达式,建立了由于驻波参数变化产生的测量误差模型,具体分析了驻波信号参数变化中幅值不相等、相位不正交、含有高频干扰这三种情况的误差变化情况。2.优化了前端原始信号处理电路和FPGA数字信号处理电路。开发了一套基于C#语言,包括将采集的数据进行实时处理,图像识别,FFT频谱分析,自适应坐标系绘图等功能的软件系统,以应用于纳米时栅误差分析实验中。3.通过实验研究,对改进实验系统进行了稳定性的评估,确定了各种误差对测量精度的影响:若两路驻波幅值不相等的情况下会产生一个二次谐波误差。若两路行波时间不正交会产一个基频和二次谐波误差。若引入n次高频干扰,会给测量误差带来一个次谐波误差。同时展开精度实验,对原始误差进行动态分离修正仿真实验,在量程200mm范围内实验精度达到了。
[Abstract]:Nano-time grating sensor is a new type of nano-scale displacement measuring instrument developed by our country. It is characterized by a large range and high precision. According to the principle of time grating measurement, the measurement error can be caused by the deviation of sensor installation, the realization of structure, the change of substrate processing and working environment, etc. This restricts the further improvement of the precision of the nanogrids sensor. At present, my team also lacks the analysis and summary of this problem in the basic research of nanometer time gate sensors. In order to study the cause of error and the rule of influence on measurement accuracy, the theoretical system of nanometer time gate sensor is developed, the measurement precision of nano time gate sensor is improved, and the performance of current data analysis experiment system of nano time gate sensor is optimized. Improve team experiment efficiency. Based on the measurement model of nanometer time gate sensor, this paper studies the error of nano time gate sensor in the working process by means of mathematics and physics, and does the following work: 1. According to the expression of nanoscale gate traveling wave, the measurement error model caused by the variation of standing wave parameters is established, and the amplitude is not equal and the phase is not orthogonal in the variation of standing wave signal parameters. Variation of error in three cases with high frequency interference. 2. The front-end original signal processing circuit and FPGA digital signal processing circuit are optimized. A set of software system based on C # language, including real-time processing, image recognition, FFT spectrum analysis, adaptive coordinate system drawing and so on, is developed, which can be used in the experiment of nanometer time grid error analysis. Through the experimental research, the stability of the improved experimental system is evaluated, and the influence of various errors on the measurement accuracy is determined: if the two standing wave amplitudes are not equal, a second harmonic error will be produced. If the two-way traveling wave time is not orthogonal, a fundamental frequency and second harmonic error will be produced. If n-th high frequency interference is introduced, it will bring a sub-harmonic error to the measurement error. At the same time, the precision experiment is carried out, and the simulation experiment of dynamic separation and correction of the original error is carried out. The accuracy of the experiment is achieved in the range of 200mm.
【学位授予单位】：重庆理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TP212

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