波纹结构对膜片式EFPI光纤声压传感器性能影响的研究

发布时间：2019-05-14 00:42

【摘要】：声压传感器在军事、医疗、农业、工业、生活等各个方面都有广泛的应用。膜片式EFPI光纤声压传感器由于具有结构微型、制作简单、成本低廉、响应迅速、对温度不敏感等优点而得到了关注。传统膜片结构中,通常采用平面结构,具有结构简单、加工容易的优势。但存在动态范围小,改善性能空间有限等缺点。本课题主要研究在微型膜片式EFPI光纤声压传感器的膜片上引入波纹结构的MEMS加工方法,及波纹结构对传感器的性能的影响。本文详细的分析了波纹膜片在不同初始应力条件下的形变理论。根据理论分析结果可知,在不同的初始应力条件下,波纹深度均是影响膜片机械性能的主要参数。对于没有初始应力的波纹膜片,其机械灵敏度随着波纹深度的增加而减少;而对于有初始应力的波纹膜片,其机械灵敏度随着波纹深度的增加先增加后减少,然后趋于稳定。提出了通过常用的光刻技术、反应离子刻蚀技术、溅射技术、热压纳米压印技术实现将波纹结构转移到金属膜片和PET膜片上的加工方法。同传统的加工波纹结构的方法相比,本课题采用的MEMS加工工艺更简单、制作周期短、节省材料并且灵活的控制波纹结构参数。利用加工出的不同波纹深度的金属膜片和PET膜片封装得到波纹膜片式EFPI光纤声压传感器。搭建了强度解调系统并对波纹膜片式EFPI光纤声压传感器进行空气中和水中的声学性能测试,从而分析了波纹结构对传感器性能的影响。测试结果表明,在膜片中引入波纹结构,对膜片式EFPI光纤声压传感器的性能有一定改善。
[Abstract]:Sound pressure sensors are widely used in military, medical, agricultural, industrial, life and other aspects. Diaphragm EFPI optical fiber sound pressure sensor has attracted attention because of its advantages of micro structure, simple fabrication, low cost, rapid response and insensitivity to temperature. In the traditional diaphragm structure, the plane structure is usually used, which has the advantages of simple structure and easy processing. However, there are some shortcomings, such as small dynamic range, limited performance space and so on. In this paper, the MEMS processing method of introducing wavy structure into the diaphragm of micro diaphragm EFPI optical fiber sound pressure sensor is studied, and the influence of wavy structure on the performance of the sensor is also studied. In this paper, the deformation theory of wavy diaphragm under different initial stress conditions is analyzed in detail. According to the results of theoretical analysis, it can be seen that the depth of ripples is the main parameter affecting the mechanical properties of diaphragm under different initial stress conditions. For the wavy diaphragm without initial stress, the mechanical sensitivity decreases with the increase of wavy depth, while for the wavy diaphragm with initial stress, the mechanical sensitivity increases first and then decreases with the increase of wavy depth, and then tends to be stable. The processing method of transferring wavy structure to metal diaphragm and PET diaphragm by common lithography technology, reactive ion etch technology, sputter technology and hot pressing nano-imprinting technology is proposed. Compared with the traditional method of machining wavy structure, the MEMS processing technology used in this paper is simpler, the fabrication cycle is short, the material is saved and the parameters of wavy structure are controlled flexibly. The wavy diaphragm EFPI optical fiber sound pressure sensor was obtained by using the fabricated metal diaphragm and PET diaphragm with different depth of ripening. The intensity demodulation system is built and the acoustic performance of the wavy diaphragm EFPI optical fiber sound pressure sensor is tested in air and water, and the influence of the wavy structure on the performance of the sensor is analyzed. The test results show that the performance of the diaphragm EFPI optical fiber sound pressure sensor is improved by introducing the wavy structure into the diaphragm.
【学位授予单位】：哈尔滨工业大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TP212

【参考文献】

中国期刊全文数据库 前10条

1 黄俊;文溢;姜飞;张长胜;赵振刚;李川;;光纤F-P腔传感器特性研究[J];传感器与微系统;2017年04期

2 陈露;朱佳利;李泽焱;王鸣;;波纹膜片式光纤法布里-珀罗压力传感器[J];光学学报;2016年03期

3 刘彬;刘欢;林杰;金鹏;;银薄膜结构的高灵敏度Fabry-Perot光纤声压传感器[J];哈尔滨工业大学学报;2016年03期

4 郑志霞;黄元庆;;基于F-P腔干涉的膜片式光纤微机电系统压力传感器[J];光子学报;2012年12期

5 卢一鑫;杨璐娜;;光纤传感器的应用现状及未来发展趋势[J];科技信息;2011年03期

6 王巧云;于清旭;;Polymer diaphragm based sensitive fiber optic Fabry-Perot acoustic sensor[J];Chinese Optics Letters;2010年03期

7 舒福璋;;半导体硅片清洗工艺的发展研究[J];中国高新技术企业;2007年12期

8 周宏,赖建军,赵悦,柯才军,张坤,易新建;SF_6/O_2/CHF_3混合气体对硅材料的反应离子刻蚀研究[J];半导体技术;2005年06期

9 倪明,张仁和,倪明,胡永明,孟洲;关于光纤水听器灵敏度的讨论[J];应用声学;2002年06期

10 邹泉波，刘理天，，李志坚;纹膜结构用于电容式硅微麦克风的研究[J];半导体学报;1996年12期

中国博士学位论文全文数据库 前1条

1 王巧云;光纤法布里—珀罗声波传感器及其应用研究[D];大连理工大学;2010年

中国硕士学位论文全文数据库 前1条

1 宫奎;基于微加工的膜片式光纤传感器的制作及其应用研究[D];安徽大学;2015年

本文编号：2476306