基于基片集成波导和消逝模谐振腔的压力传感器设计
发布时间：2019-06-01 16:56
【摘要】：提出一种新型的基于基片集成波导和消失模谐振腔的压力传感结构。设计了圆形空腔,当施加外界压力时,圆形空腔发生形变从而使谐振腔谐振频率变化。采用共面波导线对谐振腔进行耦合馈电并将频率信号传输出来。通过读取传感器的回波损耗参数(S11)来表征压力与频率的关系。利用高频仿真软件HFSS对谐振腔进行了仿真设计和优化,设计尺寸为30 mm×30 mm×1.93 mm,与传统谐振腔相比体积明显减小。传感器基底为Rogers 4003C板材,采用PCB技术进行加工。搭建压力测试平台对传感器进行测试,结果表明在0~3 N的压力范围内变化100 MHz,绝对灵敏度为25 MHz/N。仿真和实测结果比较吻合,验证了所设计压力结构的有效性。
[Abstract]:A novel pressure sensing structure based on substrate integrated waveguide and lost mode resonator is proposed. The circular cavity is designed. When the external pressure is applied, the circular cavity is deformed and the resonant frequency of the resonator is changed. The resonator is fed by coplanar wave conductor and the frequency signal is transmitted. The relationship between pressure and frequency is characterized by reading the echo loss parameter (S11) of the sensor. The high frequency simulation software HFSS is used to simulate and optimize the resonator. The design size is 30 mm 脳 30 mm 脳 1.93 mm, which is obviously smaller than that of the traditional resonator. The sensor substrate is Rogers 4003C sheet, which is processed by PCB technology. The pressure test platform is built to test the sensor. The results show that the absolute sensitivity of 100 MHz, is 25 MHz/N. in the pressure range of 0 鈮，
本文编号：2490433
[Abstract]:A novel pressure sensing structure based on substrate integrated waveguide and lost mode resonator is proposed. The circular cavity is designed. When the external pressure is applied, the circular cavity is deformed and the resonant frequency of the resonator is changed. The resonator is fed by coplanar wave conductor and the frequency signal is transmitted. The relationship between pressure and frequency is characterized by reading the echo loss parameter (S11) of the sensor. The high frequency simulation software HFSS is used to simulate and optimize the resonator. The design size is 30 mm 脳 30 mm 脳 1.93 mm, which is obviously smaller than that of the traditional resonator. The sensor substrate is Rogers 4003C sheet, which is processed by PCB technology. The pressure test platform is built to test the sensor. The results show that the absolute sensitivity of 100 MHz, is 25 MHz/N. in the pressure range of 0 鈮，
本文编号：2490433
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