超高敏感度和高响应微波湿度传感器
发布时间：2020-12-28 21:44
本文设计并制作了一款用带状纳米材料修饰的基于微波带阻滤波器的超高速、高灵敏度湿度传感器。应用所设计的交指电容,在2 GHz到12 GHz的频段内确定了两个水蒸汽敏感检测频率。优化后的双频段微带带阻滤波器获得了更高的响应和更好的品质因数,提高了湿度传感器灵敏度。为了研究微波湿度传感器的性能,将修饰了氧化钼敏感材料的传感元件置于湿度测试腔中,在室温环境下实现了对五个湿度等级的测试。测量结果表明,插入损耗从10%RH到90%RH的湿度水平呈线性变化,其7.3 GHz和9.1 GHz双频段的灵敏度分别为0.022 dB/%RH和0.069 dB/%RH。此外,湿度传感器对两个敏感频率的检测灵敏度分别为2.06MHz/%RH和2.08 MHz/%RH。并且反应恢复时间小于5 s,湿度滞后特性小于0.25%RH。本论文还从分子极化的角度探讨了微波湿敏传感的机理。这为实现高灵敏度、快速响应的微波湿度传感器提供了一种简便易行的方法。
【文章来源】：哈尔滨工业大学黑龙江省 211工程院校 985工程院校
【文章页数】：79 页
【学位级别】：硕士
【文章目录】：
Abstract
摘要
Chapter1 Introduction of Humidity Sensor
1.1 Introduction
1.2 Humidity Sensor Research Background
1.3 Humidity Sensor Basics
1.4 Humidity Sensors Classification and Applications
1.4.1 Capacitive Humidity Sensor
1.4.2 Fiber-optic Humidity Sensor
1.4.3 Piezoresistive Humidity Sensor
1.4.4 Microwave Humidity Sensor
1.5 Significance and Aim
Chapter2 Selection of Humidity Sensitive Frequency
2.1 Selection Strategies of Humidity Sensitive Frequency
2.2 Design Optimization and Preparation of Interdigital Capacitor Structure
2.2.1 Optimization of Microstrip Circuit for Interdigital Capacitor
2.2.2 Preparation of the Designed Interdigital Capacitor
2.3 Results and Analysis of Humidity Sensitive Frequency
2.3.1 Measurement Results
2.3.2 Analysis and Discussion
2.4 Summary of This Chapter
Chapter3 Selection and Preparation of Humidity Sensitive Material
3.1 Introduction and Selection of Humidity Sensitive Material
3.2 Preparation of Flake Molybdenum Trioxide
3.3 Fabrication Process Characterization of the Prepared Humidity Sensitive Material
3.4 Summary of This Chapter
Chapter4 Open Loop Resonator-Based Microwave Type Humidity Sensor
4.1 Introduction to Open-loop Resonator-Based Humidity Sensor
4.2 Design of Open Loop Resonator-Based Humidity Sensor
4.2.1 Single-band Microwave Type Humidity Sensor
4.2.2 Dual-band Microwave Humidity Sensor
4.3 PCB Fabrication Process
4.4 Measurement Results and Analysis
4.4.1 Results and Analysis of Single-band Humidity Sensor
4.4.2 Results and Analysis of Dual-band Humidity Sensor
4.5 Summary of This Chapter
Chapter5 Sensing Mechanism and Future Works
5.1 The Applications for Microwave Humidity Sensor
5.2 Future Perspectives
5.3 Sensing Mechanism Analysis
Conclusion
References
Papers published in the period of Master education
Acknowledgements
【参考文献】：
期刊论文
[1]电阻式湿度传感器技术及相关专利分析[J]. 李玉林. 电子世界. 2017(08)
[2]基于MEMS工艺的压阻式湿度传感器的设计制作[J]. 孙慧明,张筱朵,吴剑,秦明,黄庆安. 传感技术学报. 2008(05)
博士论文
[1]汽轮机组微波谐振腔湿度测量方法实验研究[D]. 田松峰.华北电力大学（河北） 2009
硕士论文
[1]基于金属硫化物的全光纤湿度传感器[D]. 陈超英.暨南大学 2016
本文编号：2944439
【文章来源】：哈尔滨工业大学黑龙江省 211工程院校 985工程院校
【文章页数】：79 页
【学位级别】：硕士
【文章目录】：
Abstract
摘要
Chapter1 Introduction of Humidity Sensor
1.1 Introduction
1.2 Humidity Sensor Research Background
1.3 Humidity Sensor Basics
1.4 Humidity Sensors Classification and Applications
1.4.1 Capacitive Humidity Sensor
1.4.2 Fiber-optic Humidity Sensor
1.4.3 Piezoresistive Humidity Sensor
1.4.4 Microwave Humidity Sensor
1.5 Significance and Aim
Chapter2 Selection of Humidity Sensitive Frequency
2.1 Selection Strategies of Humidity Sensitive Frequency
2.2 Design Optimization and Preparation of Interdigital Capacitor Structure
2.2.1 Optimization of Microstrip Circuit for Interdigital Capacitor
2.2.2 Preparation of the Designed Interdigital Capacitor
2.3 Results and Analysis of Humidity Sensitive Frequency
2.3.1 Measurement Results
2.3.2 Analysis and Discussion
2.4 Summary of This Chapter
Chapter3 Selection and Preparation of Humidity Sensitive Material
3.1 Introduction and Selection of Humidity Sensitive Material
3.2 Preparation of Flake Molybdenum Trioxide
3.3 Fabrication Process Characterization of the Prepared Humidity Sensitive Material
3.4 Summary of This Chapter
Chapter4 Open Loop Resonator-Based Microwave Type Humidity Sensor
4.1 Introduction to Open-loop Resonator-Based Humidity Sensor
4.2 Design of Open Loop Resonator-Based Humidity Sensor
4.2.1 Single-band Microwave Type Humidity Sensor
4.2.2 Dual-band Microwave Humidity Sensor
4.3 PCB Fabrication Process
4.4 Measurement Results and Analysis
4.4.1 Results and Analysis of Single-band Humidity Sensor
4.4.2 Results and Analysis of Dual-band Humidity Sensor
4.5 Summary of This Chapter
Chapter5 Sensing Mechanism and Future Works
5.1 The Applications for Microwave Humidity Sensor
5.2 Future Perspectives
5.3 Sensing Mechanism Analysis
Conclusion
References
Papers published in the period of Master education
Acknowledgements
【参考文献】：
期刊论文
[1]电阻式湿度传感器技术及相关专利分析[J]. 李玉林. 电子世界. 2017(08)
[2]基于MEMS工艺的压阻式湿度传感器的设计制作[J]. 孙慧明,张筱朵,吴剑,秦明,黄庆安. 传感技术学报. 2008(05)
博士论文
[1]汽轮机组微波谐振腔湿度测量方法实验研究[D]. 田松峰.华北电力大学（河北） 2009
硕士论文
[1]基于金属硫化物的全光纤湿度传感器[D]. 陈超英.暨南大学 2016
本文编号：2944439
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