基于压敏硅橡胶的柔性压力传感器及其阵列的研究

发布时间：2018-01-04 13:17

本文关键词：基于压敏硅橡胶的柔性压力传感器及其阵列的研究　出处：《吉林大学》2016年博士论文　论文类型：学位论文

【摘要】：柔性压力传感器是一种用于感知某些物体表面作用力大小的柔性电子器件,能贴附于各种不规则表面,在医疗健康、机器人、生物力学等领域有着广泛的应用前景,逐渐受到人们的重视。针对目前柔性压力传感器未能解决的兼具柔韧性和准确测量压力分布信息的难题,本论文进行了传感材料、单元传感器件、传感阵列及其自动感知分析系统等多方面的创新研究。具体研究内容和创新点如下:1.通过炭黑掺杂有机硅橡胶,制作压敏材料。研究炭黑/硅橡胶复合材料所需材料的性能、配方、制备方法以及其在直流电场和交流电场作用下的压敏特性。通过研究不同交流频率下炭黑/硅橡胶复合材料表面压敏特性,得出器件的最优化频率为1 K Hz,建立微观机理模型,探索压敏复合材料的压敏机理,同时指出基于交流电场的研究对炭黑/硅橡胶压敏材料的重大意义。2.研究不同质量分数的CB粒子填充硅橡胶复合材料,找到最优化掺杂浓度2.5%,获得了较好灵敏度的器件;当外界压力0-20 N(0-0.4 M Pa)时,传感器显示正压阻效应;传感器的响应时间和恢复时间都少于3 s;与当前文献中导电复合材料相比,具有较高灵敏度;同时对传感器的敏感机理进行探索。3.设计了一种基于柔性衬底和柔性压敏材料的压力传感器阵列。该4×4的柔性阵列尺寸为2.5 cm×2.5cm×0.8 mm,衬底是用光刻工艺制备的PET-ITO柔性基板,压敏材料为导电橡胶(CSA57-7RSC PCR Technical)。实验证明,该全柔性压力传感阵列在0-4 N(0-0.32 M Pa)的负载下呈现负压阻效应,具有高的灵敏度和快的响应恢复特性。该压力传感阵列传感单元间自带串扰隔离功能。为了准确测知所感应到的力的大小和方位,设计和制作了该柔性传感阵列的检测电路,采样数据最后通过Lab VIEW分析处理并显示,初步测试了传感阵列的基本性能参数。实验结果表明:该阵列可实现压力分布的实时测量。该传感阵列性能稳定,制作成本低且适用于大面积制作,可应用于智能机器人手等相关领域。
[Abstract]:Flexible pressure sensor is a kind of flexible electronic device which can be used to perceive the force on the surface of some objects. It can be attached to various irregular surfaces, in medical care and health, robot. Biomechanics and other fields have a wide range of application prospects, gradually attracted attention. At present, flexible pressure sensor can not solve the problem of flexibility and accurate measurement of pressure distribution information. In this paper, the sensing materials, unit sensing devices, sensor arrays and their automatic sensing analysis system are studied. The specific research contents and innovations are as follows: 1. Through the carbon black doped silicone rubber. Make pressure sensitive material. Study the properties and formula of carbon black / silicone rubber composite material. The method of preparation and the pressure sensitive characteristics of carbon black / silicone rubber composites under the action of DC and AC electric field were studied by studying the surface pressure sensitivity characteristics of carbon black / silicone rubber composites at different AC frequencies. The optimum frequency of the device is 1 K Hz. The micro mechanism model is established and the pressure sensitive mechanism of the pressure sensitive composite is explored. At the same time, it is pointed out that the research based on AC electric field is of great significance to carbon black / silicone rubber varistor materials. 2. To study CB particles filled with silicone rubber composites with different mass fraction, the optimum doping concentration is found to be 2.5%. The device with good sensitivity is obtained. The sensor shows positive piezoresistive effect when the external pressure is 0-20 Nu 0-0.4 MPA. The response time and recovery time of the sensor are less than 3 s; Compared with the conductive composites in the current literature, the composites have higher sensitivity. At the same time, the sensitivity mechanism of the sensor is explored. 3. A pressure sensor array based on flexible substrate and flexible pressure sensor material is designed. The size of the 4 脳 4 flexible sensor array is 2.5. Cm 脳 2.5cm 脳 0.8 mm. The substrate is a PET-ITO flexible substrate prepared by photolithography. The pressure sensitive material is conductive rubber CSA57-7RSC PCR technique. The fully flexible pressure sensing array exhibits a negative piezoresistive effect under the loading of 0-4 Nu 0-0.32 M Pa. It has high sensitivity and fast response recovery characteristics. The pressure sensor array sensor unit has its own crosstalk isolation function. In order to accurately determine the magnitude and orientation of the sensing force. The detection circuit of the flexible sensor array is designed and fabricated, and the sampling data is analyzed and displayed by Lab VIEW. The experimental results show that the sensor array can be used to measure the pressure distribution in real time. The sensor array is stable in performance, low in cost and suitable for large area fabrication. It can be applied to intelligent robot hand and other related fields.
【学位授予单位】：吉林大学
【学位级别】：博士
【学位授予年份】：2016
【分类号】：TP212

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