新型结构的光纤的微压传感器的研究

发布时间：2018-01-04 17:16

本文关键词：新型结构的光纤的微压传感器的研究　出处：《南京师范大学》2016年博士论文　论文类型：学位论文

【摘要】：光纤法布里-珀罗传感器自上世纪八十年代开始发展,现已成为传感领域一个研究热点。此类传感器结构简单、测量精度高、抗电磁干扰、化学性质稳定,且普遍体积小、质量轻,便于集成传感网络,能在狭窄空间和恶劣环境下正常工作,在工程建设中具有很大的应用价值。微机电系统(MEMS)微细加工技术的发展为光纤法布里-珀罗(F-P)传感器的制造提供了新的方法。本文提出了三种光纤法布里-珀罗微压传感器结构,制作过程中采用了近紫外光刻、磁控溅射镀膜、硅片湿法腐蚀、阳极键合等多项MEMS工艺。设计并制作了基于45度光纤的法布里-珀罗波纹膜微压传感器,获得了较高的传感灵敏度。该传感器采用金属波纹膜作为敏感元件,其与厚度相同的无波纹膜片相比,在同等压力下的形变量更大。借助仿真软件对波纹膜的波纹宽度、波纹高度、波纹间距等参数进行了优化。制作完成的传感器在0～0.1MPa范围内灵敏度达到705.6μm/MPa。设计采用MEMS工艺,通过SU-8胶两次光刻制作光纤槽,一方面便于光纤的固定,另一方面可以通过控制匀胶速度来控制胶层厚度,从而控制F-P腔腔长。经实验测试,该传感器的线性度高、重复性好、迟滞误差小。利用传感器温度特性稳定,腔长随温度变化呈线性的特点,对传感器进行了粗略的温度补偿。设计并制作了基于45度光纤的复合法布里-珀罗干涉腔微压传感器,实现了温度补偿。该传感器利用了45度光纤结构在传感头中形成三个反射面,分别是光纤的纤芯包层分界面、光纤侧壁和硅敏感膜。前两者组成第一个F-P干涉腔,腔长仅随温度变化；后两者组成第二个F-P干涉腔,腔长随着外界压力和温度的变化一起发生变化。在外界温度变化较大时,可以利用两个腔长的变化关系进行温度补偿,补偿效果明显。实验表明,该传感器在0～0.1MPa范围内的灵敏度为60.9μm/MPa,迟滞误差小,线性度好。设计并制作了基于光纤法兰盘结构的法布里-珀罗微压传感器。该传感器结构简单,价格低廉,工作稳定。设计采用硅膜-玻璃环-光纤结构,利用了商业法兰盘和跳线,可以直接进行光线的固定与对准。玻璃环进行了严格的抛光处理,通过阳极键合与硅敏感膜连接在一起,保证了装置的气密性。F-P干涉腔的腔长可以由玻璃环的长度唯一确定并精确控制,同时玻璃环保证了敏感膜与光纤端面的平行。在0～0.1MPa范围内,传感器灵敏度为61.9μm/MPa,与我课题组之前的研究成果相比灵敏度提升了一个数量级。传感器重复性好,机械强度高,制作成本低廉。
[Abstract]:Fiber Fabri Perot sensor since the last century began to develop in 80s, has become a hot research field. This kind of sensor sensor has the advantages of simple structure, high precision, anti electromagnetic interference, stable chemical properties, and generally small size, light weight, easy integration of sensor network, can work normally in the narrow space and harsh environment, with great application value in engineering construction. Microelectromechanical system (MEMS) development of micro machining technology for fiber Fabri Perot (F-P) provides a new method for the fabrication of sensors. This paper presents three kinds of optical fiber Fabri Perot micro pressure sensor structure, production process using near UV lithography, magnetron sputter coating, silicon wet etching, anodic bonding and other MEMS technology. The design and fabrication of 45 fiber Fabri Perot corrugated membrane based micro pressure sensor, the higher the sensitivity. The sensor uses corrugated metal film as the sensitive element, the corrugated diaphragm and the thickness of the same than in the same pressure form a more variable. By the simulation software of the corrugated corrugated membrane width, wave height, wave spacing and other parameters were optimized. The sensor made of sensitivity in the range of 0 ~ 0.1MPa to 705.6 m/MPa. design using MEMS technology, the SU-8 gel two times lithography fiber slot, one hand to facilitate the fixation of the optical fiber, on the other hand can control the spin speed to control the layer thickness, so as to control the F-P cavity length. After testing, the sensor has high linearity, repeatability, hysteresis error is small. The temperature characteristic of the sensor is stable, the cavity length is linear temperature change characteristics of temperature compensation sensor is designed and fabricated. The rough composite Fabri 45 degree fiber Perot interference cavity based on micro pressure Sensor to realize the temperature compensation. The sensor uses 45 optical fiber structure is formed of three reflecting surfaces in the sensing head, which is the core of the fiber cladding interface, fiber wall and silicon sensitive film. The composition of the first F-P interference cavity, the cavity length only with the temperature change; two second F-P interference cavity, cavity length with the change of external temperature and pressure changes in the outside world. With large temperature changes, can be used for temperature compensation of two cavity length variation, obvious compensation effect. Experimental results show that the sensor sensitivity in 0 ~ 0.1MPa range is 60.9 m/MPa, the hysteresis error is small. Good linearity. The design and fabrication of the fiber flange structure Fabri Perot based on micro pressure sensor. The sensor has the advantages of simple structure, low price, stable design using silicon film - glass fiber ring structure, the use of commercial flange and Jumper, can direct light and fixed alignment. The glass ring of the polished strictly, and silicon sensitive film are connected together by anodic bonding, ensure the tightness of the.F-P device interference cavity length can be made of glass ring length is only determined and precise control, at the same time the environmental sensitive film glass and the fiber end is parallel. In the range of 0 ~ 0.1MPa, the sensitivity of the sensor is 61.9 m/MPa, compared with the results of my research group before study sensitivity is improved by one order of magnitude. The sensor has good repeatability, high mechanical strength, low production cost.

【学位授予单位】：南京师范大学
【学位级别】：博士
【学位授予年份】：2016
【分类号】：TP212

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