集成电化学与FET的微纳谐振生物传感器研究

发布时间：2018-01-13 21:12

本文关键词：集成电化学与FET的微纳谐振生物传感器研究　出处：《天津大学》2016年博士论文　论文类型：学位论文

【摘要】：生物传感器,特别是基于界面的亲和型生物传感器近年来发展迅速,在生物、化学、医疗等领域具有重要的应用价值。得益于微米纳米技术的发展,生物传感器不断向微观尺度发展,呈现高密度集成、高灵敏度检测、智能型传感等趋势。基于压电效应的薄膜体声波传感器因其体积小、功耗低、灵敏度高、与CMOS工艺兼容、易于阵列化从而实现高通量检测等优点,而受到广泛关注。本论文紧扣这一研究热点,进一步探索了薄膜体声波传感器的应用,并借鉴了多种检测技术在单芯片上集成的已有研究成果,提出了电化学/场效应管与薄膜体声波谐振器的硅基单片集成方案。制造了该集成单芯片,搭建了电化学工作电极-薄膜体声波谐振器、场效应管延伸栅极-薄膜体声波谐振器两套测试系统,成功检测了葡萄糖浓度变化、DNA杂交、层层自组装聚合物薄膜生长、抗体-抗原蛋白特异性结合等过程,从而验证了该集成单芯片传感器的有效性与实用性。本论文的研究内容和成果可以归纳为以下几个方面:1、提出了以氮化铝薄膜为核心的单片集成电化学/场效应管的薄膜体声波传感系统,该系统拥有电化学/电荷、重力(质量)、粘度多种检测模式,具备获取复杂界面信息的能力。2、在硅基单芯片上集成了电化学工作电极与薄膜体声波谐振器两种传感器,通过检测界面质量变化优化了生物敏感膜的生长条件,并通过对氧化还原反应电流、溶液粘度变化的监控实时检测了葡萄糖浓度变化。3、在硅基单芯片上集成了场效应管延伸栅极与薄膜体声波谐振器两种传感器,成功检测了聚电解质层层自组装过程,以及抗体-抗原结合过程,并通过分析电荷和质量两种响应深入研究了以上过程的机制。4、将石墨烯修饰到薄膜体声波传感器表面,增强了薄膜体声波传感器对两种典型的有机气体的检测灵敏度。5、将聚醋酸乙烯酯旋涂在薄膜体声波传感器表面,极大地提升了薄膜体声波湿度传感器对湿度变化的检测灵敏度。
[Abstract]:Biosensor, especially the interface based affinity biosensor, has been developed rapidly in recent years. It has important application value in biology, chemistry, medicine and so on. Biosensors continue to develop to the micro scale, showing the trend of high density integration, high sensitivity detection, intelligent sensing, etc. Thin film bulk acoustic sensors based on piezoelectric effect have small size, low power consumption and high sensitivity. It is compatible with CMOS process and easy to be arrayed to achieve high throughput detection, which has attracted wide attention. In this paper, the application of thin film bulk acoustic sensor is further explored by focusing on this research hotspot. The silicon-based monolithic integration scheme of electrochemical / FET and thin film bulk acoustic resonator is proposed, and the integrated monolithic chip is fabricated. The electrochemical working electrode thin film bulk acoustic resonator the field effect tube extension gate and the thin film bulk acoustic wave resonator were set up to successfully detect the glucose concentration variation and DNA hybridization. Layer by layer self-assembly polymer film growth, antibody-antigen protein binding and other processes. Thus, the validity and practicability of the integrated single-chip sensor are verified. The research contents and results of this thesis can be summarized as follows: 1. A monolithic integrated electrochemical / FET film bulk acoustic sensing system with aluminum nitride film as the core is proposed. The system has electrochemical / charge, gravity (mass, viscosity) detection modes. With the ability of obtaining complex interface information, two kinds of sensors, electrochemical working electrode and thin film bulk acoustic resonator, are integrated on silicon based single chip. The growth conditions of biosensitive membrane were optimized by detecting the change of interface quality, and the change of glucose concentration was measured in real time by monitoring the redox reaction current and the change of solution viscosity. Two kinds of sensors, field effect tube extension gate and thin film bulk acoustic resonator, were integrated on silicon based single chip. The polyelectrolyte layer self-assembly process and the antibody antigen binding process were successfully detected. Through the analysis of charge and mass response, the mechanism of the above process. 4. The graphene was modified to the surface of the thin film bulk acoustic sensor. The sensitivity of the thin film bulk acoustic sensor for two typical organic gases was enhanced. The polyvinyl acetate was spin-coated on the surface of the thin film bulk acoustic sensor. The sensitivity of thin film bulk acoustic humidity sensor to humidity change is greatly improved.
【学位授予单位】：天津大学
【学位级别】：博士
【学位授予年份】：2016
【分类号】：TP212

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