极紫外电荷分割型阳极光子计数成像探测器的研究

发布时间：2018-03-27 09:55

本文选题：电荷分割型光子计数成像探测器　切入点：楔条形阳极　出处：《中国科学院研究生院(长春光学精密机械与物理研究所)》2016年博士论文

【摘要】：随着空间技术的发展,越来越多的极紫外波段观测仪器被发射到宇宙空间,对地球周围及至广阔宇宙空间中不同星体产生的微弱极紫外辐射进行了高精度探测,其中光子计数成像探测器是实现这种探测的优先选择器件。论文重点对电荷分割型阳极光子计数成像探测器中的楔条形阳极探测器和Vernier阳极探测器进行研究。具体研究内容如下:1、根据微通道板二次电子发射理论,利用Comsol软件仿真出三维“V”型级联微通道板的电子倍增过程,研究在不同工作电压下微通道板的增益特性;重点推导一维Vernier阳极和二维Vernier阳极的质心解码算法,通过仿真针孔阵列模拟成像,验证Vernier阳极位置解码的正确性。2、根据分割噪声的来源,提出了一种计算分割噪声的方法,得到由分割噪声引起的质心位置偏差与阳极板参数之间的关系,同时得到提高微通道板增益能有效降低分割噪声对质心位置偏差的影响的结论。讨论了电子云团尺寸、极间串扰、电子噪声、半导体薄膜对电荷分割型阳极探测器成像性能的影响。3、分析了阳极的极间电容值对电荷分割型阳极探测器成像性能的影响,利用ANSYS软件建立电荷分割型阳极(楔条形阳极、Vernier阳极)三维模型,通过有限元方法计算出不规则形状电极间的电容值;利用激光微加工设备加工出楔条形阳极和Vernier阳极,实测阳极的极间电容值与仿真值吻合,验证了阳极有限元模型的正确性;在此基础上,对电荷分割型阳极的结构参数进行优化,给出电荷分割型阳极版的加工参数。4、搭建楔条形阳极光子计数成像探测器和Vernier阳极光子计数成像探测器实验装置,并对楔条形阳极探测器进行暗噪声、空间分辨率以及不同电荷读出方式性能测试;评估了分割噪声与电子噪声对两个周期Vernier阳极探测器分辨率的影响,并进行单矩形孔的成像实验。
[Abstract]:With the development of space technology, more and more ultra-ultraviolet observation instruments have been launched into space, and the weak extreme ultraviolet radiation produced by different stars around the earth and in the vast space has been detected with high precision. Among them, photon counting imaging detector is the first choice device to realize this kind of detection. This paper focuses on the research of wedge strip anode detector and Vernier anode detector in charge split anode photon counting imaging detector. The contents of the body research are as follows: 1. According to the second electron emission theory of microchannel plate, The electron multiplication process of 3D "V" cascade microchannel plate is simulated by using Comsol software, and the gain characteristics of the microchannel plate under different operating voltages are studied, and the centroid decoding algorithms of one-dimensional Vernier anode and two-dimensional Vernier anode are derived. The correctness of Vernier anodic position decoding is verified by simulated pinhole array imaging. According to the source of segmentation noise, a method for calculating segmentation noise is proposed. The relationship between the centroid position deviation caused by segmentation noise and the parameters of the anode plate is obtained. At the same time, it is concluded that increasing the gain of the microchannel plate can effectively reduce the effect of the segmentation noise on the centroid position deviation. The size of the electron cloud is discussed. The effects of interpole crosstalk, electronic noise and semiconductor film on the imaging performance of charge-separated anode detector are analyzed. The effect of the capacitance between electrodes on the imaging performance of charge-separated anode detector is analyzed. The three-dimensional model of charge split anode (wedge strip anode Vernier anode) was established by using ANSYS software. The capacitance between irregular electrodes was calculated by finite element method, and the wedge-shaped anode and Vernier anode were fabricated by laser micromachining equipment. The measured capacitance between the electrodes is in agreement with the simulation value, which verifies the correctness of the finite element model of the anode, on the basis of which, the structural parameters of the charge-separated anode are optimized. The machining parameters. 4 of charge split anode plate are given. The experimental device of wedge anode photon counting imaging detector and Vernier anode photon counting imaging detector is built, and the dark noise of wedge strip anode detector is carried out. The effects of segmentation noise and electronic noise on the resolution of two periodic Vernier anode detectors were evaluated, and the imaging experiments of single rectangular holes were carried out.
【学位授予单位】：中国科学院研究生院(长春光学精密机械与物理研究所)
【学位级别】：博士
【学位授予年份】：2016
【分类号】：TN23

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